Atomic layer removal process with higher etch amount

Abstract

Higher overall etch rate and throughput for atomic layer removal (ALR) is achieved. The reaction is a self-limiting process, thus limiting the total amount of material that may be etched per cycle. By pumping down the process station between reacting operations, the reaction is partially “reset.” A higher overall etch rate is achieved by a multiple exposure with pump down ALR process.

Description

RELATED APPLICATIONS[0001]This application is a continuation of and claims priority to U.S. application Ser. No. 13 / 244,032, titled “ATOMIC LAYER REMOVAL PROCESS WITH HIGHER ETCH AMOUNT,” filed Sep. 23, 2011, which is a divisional of U.S. patent application Ser. No. 12 / 343,102 (now U.S. Pat. No. 8,058,179), titled “ATOMIC LAYER REMOVAL PROCESS WITH HIGHER ETCH AMOUNT,” filed Dec. 23, 2008, which are incorporated herein by reference for all purposes.FIELD OF THE INVENTION[0002]This invention relates to electronic device fabrication processes and associated apparatus. More specifically, it relates to dry etch processes for removing dielectric films.BACKGROUND OF THE INVENTION[0003]It is often necessary in semiconductor processing to remove or etch dielectric films from a substrate surface. Various etching processes are available to etch different materials and geometries at different rates. Considerations for choosing the appropriate etch process include etch rates, selectivity to oth...

AI Technical Summary

Benefits of technology

[0006]Atomic layer removal (ALR) etch is a process that offers excellent process control. In ALR, a film material is reacted to form a solid reaction product having a greater specific volume than the film material it consumes. The solid reaction product is sublimated and removed. The reaction is self-saturating, thus limiting the amount of material that may be etched per cycle. Multiple cycles may be required to etch a desired amount of material. Overall etch rate and throughput for an ALR etch process is increased by pumping down the process station between reacting operations. Pumping down the process station partially “resets” the saturation and allows another reacting operation before the solid reaction product is removed. The result is a higher overall etch rate per cycle.

[0009]In the pumping operation, the processing station pressure may be reduced by reducing gas flow or by increasing a pump power, for example, a turbo pump. The reduced pressure may be between about 0.01 mTorr and about 100 mTorr, less than about 50 mTorr, preferably less than 6 mTorr. This reduced pressure may be maintained for a period of between about 1 second and about 60 seconds, or between about 5 second and about 30 seconds. Increased duration at reduced pressure is found to increase the effectiveness of the “reset,” up to a point. However, the increase in effectiveness of the “reset” is offset by the increase in total process time—increased duration at reduced pressure may decrease overall etch rate and throughput by increasing total process time. In certain embodiments, the reduced pressure duration at about 30 seconds yields an effective “reset” that provides increased etch rate and thus improved throughput. Overall, etch rate and throughput gain occur when the reduced pressure duration is less than or equal to the duration of the removing (sublimating) operation. During the reduced pressure operation, an inert purge gas may be flowed into the processing station. In certain cases, it may be desirable to use heated gas(es) for the purge step to encourage partial sublimation of the solid reaction product.

[0011]By applying the multiple exposure with pump down ALR process as disclosed, the reaction time to etch about 100{acute over (Å)} of a silicon oxide material may be reduced or improved by at least about 15% from the single cycle ALR process. In other words, the react-pump-react-sublimate may be at least 15% faster than react-sublimate. This process may also be at least 10% faster than a multiple cycle ALR process, where reacting and sublimating are repeated without a pumping operation. In other words, the react-pump-react-sublimate may be at least 10% faster than react-sublimate-react-sublimate.

[0012]In another aspect, the present invention pertains to a gap filling process. This process may be used in filling of shallow trench isolation (STI), inter-layer dielectric (ILD), inter-metal dielectric (IMD), or pre-metal dielectric (PMD) features. The gap fill method includes depositing a fill material in a gap and on the surface of a substrate; reacting a portion of the film with one or more reactants to form a solid reaction product, pumping the processing station to a reduced pressure, reacting again with one or more reactants, removing the solid reaction product, and repeating the depositing operation to fill the feature. The solid reaction product in an ALR process has a greater specific volume than the fill material it consumes. Thus for certain gap geometries, the solid reaction product formed from the material consumed on a circumferential sidewall may block reactants from reaching the bottom of a gap to etch material there. Thus, the fill material at the bottom of the feature may be substantially protected from the reacting operations, leading to more efficient gap fill.

Problems solved by technology

The reaction is self-saturating, thus limiting the amount of material that may be etched per cycle.

However, the increase in effectiveness of the “reset” is offset by the increase in total process time—increased duration at reduced pressure may decrease overall etch rate and throughput by increasing total process time.

Images