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Non-contact transfer hand

a transfer hand and hand-held technology, applied in the field of non-contact transfer hands, can solve the problems of difficult to form holes with a small diameter, difficult to reduce the thickness inconvenient drilling, so as to achieve easy thinning of the suction holding plate, easy to reduce the depth of the groove, and achieve stable suction performance.

Active Publication Date: 2015-10-29
TOYOTA JIDOSHA KK
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

This patent is about a device called a non-contact transfer hand that has a chamber for holding gas. The chamber has a gas discharge groove and a gas supply groove for supplying gas to the chamber. The patent proposes a new design that allows for easier formation of shallow gas flow passages and thinning of the suction holding plate. The gas discharge grooves can be symmetrically arranged, and the gas supply groove may have a main groove and a width reduction groove. The chamber may also have a projection to improve uniformity of gas flow. Overall, the device allows for stable suction performance and efficient gas supply.

Problems solved by technology

However, reduction in diameter of the drill is not preferable when breaking or bending of the drill during a process is taken into consideration.
As a result, it is difficult to form the hole with a small diameter.
For this reason, in the related art, it is difficult to reduce a thickness of the suction holding plate.

Method used

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Examples

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Embodiment Construction

[0024]A detailed description will hereinafter be made on preferred embodiments of a non-contact transfer hand according to the invention with reference to the drawings. The embodiments of the invention particularly relate to a non-contact transfer hand that is used to suck a workpiece having a flat plate shape, such as a semiconductor wafer and a glass substrate, over a suction surface in a non-contact state and transfer the workpiece to a specified location.

[0025]As shown in FIG. 1 to FIG. 3, a non-contact transfer hand 1 is mounted to a transfer robot in a microminiature semiconductor facility and used to transfer a thin flat workpiece W. The hand 1 is equipped with a suction holding plate 2 that has a thickness of approximately 1.5 mm and that has a flat-shaped suction surface 2a. The suction holding plate 2 that is made of a resin or a metal has: a circular suction main portion 2A that is slightly smaller than the workpiece (the semiconductor wafer, the glass substrate, or the l...

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Abstract

A non-contact transfer hand includes a suction holding plate and a lid portion. The suction holding plate has a flat-shaped suction surface as a front surface, a non-suction surface as a back surface, and a chamber. The suction surface has a gas discharge groove. The non-suction surface has a gas supply groove that has a gas introduction port. The chamber communicates with an end of the gas supply groove. A wall surface of the chamber has an inlet. The gas supply groove is configured to supply gas from the gas introduction port toward the chamber. The gas discharge groove communicates with the chamber via the inlet, and is configured to discharge the gas in a direction apart from the chamber. The lid portion is fixed on the non-suction surface to cover the gas supply groove and the chamber.

Description

INCORPORATION BY REFERENCE[0001]The disclosure of Japanese Patent Application No. 2014-091344 filed on Apr. 25, 2014 including the specification, drawings and abstract is incorporated herein by reference in its entirety.BACKGROUND OF THE INVENTION[0002]1. Field of the Invention[0003]The invention relates to a non-contact transfer hand.[0004]2. Description of Related Art[0005]A technique regarding a non-contact transfer hand is disclosed in Japanese Patent Application Publication No. 2009-032744 (JP 2009-032744 A). A Bernoulli chuck (a non-contact transfer hand) described in JP 2009-032744 has a configuration in which a grip unit is coupled to a disc-shaped suction holding plate. In this suction holding plate, a suction surface for holding a workpiece has four air discharge grooves that are located on an outer peripheral side of the suction holding plate. An outer end and a suction surface side of each of the air discharge grooves are opened. In addition, a compressed air supply pass...

Claims

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Application Information

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IPC IPC(8): B25J15/06
CPCB25J15/0616H01L21/67784H01L21/6838
Inventor ABE, NOBUHIRA
Owner TOYOTA JIDOSHA KK