Liquid crystal polymer-based electrode array and package for neural implant, and manufacturing method therefor

Abstract

A method for manufacturing a liquid crystal polymer-based electrode array for a neural implant, according to the present invention, can comprise the steps of: forming a seed layer on a liquid crystal polymer substrate; forming a plating mold having a pattern selectively exposing a part of the upper part of the seed layer; plating an electrode material on the exposed seed layer by using the plating mold as a plating barrier layer; forming an electrode by removing the plating mold and the seed layer therebelow; embedding the electrode by compressing a liquid crystal polymer cover layer on the electrode; and forming an electrode site exposing the upper part of the electrode by selectively removing a part of the liquid crystal polymer cover layer.

Description

TECHNICAL FIELD[0001]The present invention relates to a liquid crystal polymer-based neural implant, and more particularly, to an electrode array and package for a liquid crystal polymer-based neural implant adequate for being applied to a liquid crystal polymer-based neural implant apparatus and a method of manufacturing the same.BACKGROUND ART[0002]As is well known, a neural implant includes a sealed package portion with an electronic component (or an electronic module) built therein and an electrode portion configured to interface with nervous tissue and input or output a signal to or from an electronic component. The electrode portion that interfaces with nerves generally has a multi-channel electrode site and interacts with a nerve cell or tissue to transfer electrostimulation or to measure various micro bio-signals caused by nervous tissue after being inserted into a human body.[0003]In the case of a conventional neural implant, an electrode is manufactured based on a micro me...

AI Technical Summary

Benefits of technology

[0037]In a liquid crystal polymer-based neural implant according to the present invention, since it is possible to manufacture an electrode using a semiconductor process and to manufacture a sealed package using thermocompression, compared with a conventional neural implant device based on a metal wire and a metal package, not only a yield can be relatively improved but also manufacturing costs can also be significantly lowered and it is possible to provide a relatively large number of channels in the same area.

Problems solved by technology

However, since such conventional neural implants are manually manufactured and need a high skill level in manufacturing an electrode and a complicated packaging process, manufacturing costs increase and a yield is low.

However, in this case, since adequate pressure is not transferred between a liquid crystal polymer substrate and a cover layer, adhesion between layers is decreased.

Additionally, in the conventional method of manufacturing a micro neural electrode, the minimum thickness of a liquid crystal polymer film in commercial use is limited to 25 μm and the minimum thickness of an electrode manufacturable when a substrate and a cover layer are thermally compressed is limited to 50 μm.

Due to the limitations of thickness, it is difficult to realize an electrode with high flexibility (for example, an electrode that is inserted into a retina).

Also, since a liquid crystal polymer film having a thickness of several tens of μm has inferior optical characteristics (for example, permeability and the like), it is impossible to integrate an optical sensor that needs high resolution (a photodiode and the like) inside a sealed package.

To prevent such problems, since it is necessary to cut with a margin at or above an alignment error, it is difficult to manufacture micro sized electrodes due to this.

Also, in the conventional method of manufacturing a micro neural electrode, since a liquid crystal polymer film is simply positioned above and below a circuit with an electronic component attached thereto and then thermocompression is performed while a sealed package portion is packaged, excessive pressure is applied to the electronic component in such a way that a risk of disconnection, short circuit, or a failure of the component may be present.

Also, since uniform pressure is not transferred between liquid crystal polymer films, a crease and the like is generated in such a way that not only aesthetics may be spoiled but also sealability decreases.

Such problems may become more severe in that case of a sealed package that needs a curved surface, for example, an artificial retina attachable to an eyeball.

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