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Method of manufacturing chip package structure with conductive pillar

a technology of chip package and conductive pillar, which is applied in the direction of semiconductor devices, electrical equipment, semiconductor/solid-state device details, etc., can solve the problems of disadvantageous damage to devices including semiconductor chips, and achieve the effects of reducing the thickness reducing the production cost of the chip package structure, and avoiding laser damage to the pads of semiconductor components

Inactive Publication Date: 2019-02-07
POWERTECH TECHNOLOGY INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

The present invention is a chip package structure and manufacturing method that improves reliability and yield while reducing production cost and overall thickness. The chip package structure includes a semiconductor component with conductive pillars formed on it, which are then encapsulated and connected by a redistribution layer. Multiple semiconductor components can be stacked on top of each other, and the process can be repeated to create a stacked structure. This reduces the thickness of the chip package and avoids damage to the pads of the semiconductor component, resulting in better electrical performance and a smaller gap between conductive pillars. The method also eliminates the need for expensive and time-consuming laser drilling processes.

Problems solved by technology

As a result, the device including a semiconductor chip is disadvantageously damaged.

Method used

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  • Method of manufacturing chip package structure with conductive pillar
  • Method of manufacturing chip package structure with conductive pillar
  • Method of manufacturing chip package structure with conductive pillar

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Embodiment Construction

[0018]Reference will now be made in detail to the present preferred embodiments of the invention, examples of which are illustrated in the accompanying drawings. Wherever possible, the same reference numbers are used in the drawings and the description to refer to the same or like parts.

[0019]FIG. 1 to FIG. 7 illustrate cross-sectional views of a manufacturing process of a chip package structure according to an embodiment of the invention. In the present embodiment, a manufacturing process of a chip package structure may include the following steps. Referring to FIG. 1, a first semiconductor component 110 is disposed on a first carrier 10 as shown in FIG. 1. The first semiconductor component 110 may be a chip. The first semiconductor component 110 may include a first active surface 112 and a plurality of first pads 114 disposed on the first active surface 112. Then, a plurality of first conductive pillars 116 are formed on the first pads 114. Each of the first conductive pillars 116...

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Abstract

A method of manufacturing a chip package structure comprising: disposing a first semiconductor component on a first carrier, wherein the first semiconductor component comprising a first active surface and a plurality of first pads disposed on the first active surface; forming a plurality of first conductive pillars on the first pads, wherein each of the first conductive pillars is a solid cylinder comprising a top surface and a bottom surface, and a diameter of the top surface is substantially the same as a diameter of the bottom surface; forming a first encapsulant to encapsulate the first semiconductor component and the first conductive pillars, wherein the first encapsulant exposes the top surface of each of the first conductive pillars; forming a first redistribution layer on the first encapsulant, wherein the first redistribution layer is electrically connected to the first conductive pillars; and removing the first carrier.

Description

CROSS REFERENCE TO RELATED APPLICATION[0001]This application is a divisional application of U.S. application Ser. No. 15 / 599,477, filed on May 19, 2017, now allowed, which claims the priority benefit of U.S. provisional application Ser. No. 62 / 385,257, filed on Sep. 9, 2016. The entirety of each of the above-mentioned patent applications is hereby incorporated by reference herein and made a part of specification.BACKGROUND OF THE INVENTIONField of the Invention[0002]The present invention generally relates to chip package structure and a manufacturing method thereof. More particularly, the present invention relates to a stacked type chip package structure and a manufacturing method thereof.Description of Related Art[0003]Recently, attention has paid to a semiconductor device called a “substrate with a built-in chip” in which a chip and the like are buried in a substrate made of resin and the like and a semiconductor device in which an insulating layer and a wiring layer are formed on...

Claims

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Application Information

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Patent Type & Authority Applications(United States)
IPC IPC(8): H01L23/522H01L23/00H01L23/31H01L21/56H01L25/04H01L25/00
CPCH01L24/27H01L23/3107H01L23/5226H01L24/11H01L21/56H01L2224/32145H01L24/32H01L25/04H01L25/50H01L24/14H01L23/3121H01L23/49838H01L23/528H01L25/071H01L2225/06527H01L2224/24147H01L23/49816H01L23/5389H01L25/03H01L25/0657H01L25/105H01L2224/04105H01L2224/12105H01L2224/16227H01L2224/73267H01L2225/1035H01L2225/1058H01L2924/1532H01L2924/18162H01L2225/06524H01L2225/06568H01L23/3128H01L21/568H01L21/6835H01L2221/68359H01L24/19H01L2224/92244H01L2224/83005H01L2224/32225H01L24/20H01L24/73H01L24/92
Inventor HSU, HUNG-HSINLIN, NAN-CHUN
Owner POWERTECH TECHNOLOGY INC