This invention relates to the field of
silicon microphone technology, more specifically, to a method for fabricating a
MEMS microphone using multi-cavity SOT
wafer by Si-Si fusion bonding technology, which comprises a multi-cavity
silicon backplate and a
monocrystalline silicon diaphragm, both are separated with a layer of
silicon dioxide to form the
capacitor of the
MEMS microphone. The
monocrystalline silicon diaphragm has advantages such as low
residual stress and good uniformity, which increase the yield and sensitivity of MEMS silicon
microphone; the diaphragm comprises tiny release-assistant holes, spring structures with anchors and bumps which can quickly release the
residual stress and reduce the probability of
stiction between the backplate and the silicon diaphragm. This structure will further improve yield and reliability of
MEMS microphone. Therefore, this invention provides simple and reliable process for fabricating MEMS microphones with high sensitivity, good uniformity, excellent reliability and high yield.