Processing liquid circulating apparatus

Abstract

A processing liquid circulating apparatus includes an ultraviolet radiation applying unit and a cleaning unit for cleaning a water flow passageway from a waste liquid tank to a clear water pump. The ultraviolet radiation applying unit includes an ultraviolet lamp, a quartz glass tube defining therein a first space surrounding the ultraviolet lamp, such that gas can be introduced into and discharged from the first space, and a frame defining therein a second space surrounding the quartz glass tube, such that clear water can be introduced into and discharged from the second space. The cleaning unit has an oxygen charge unit for charging oxygen into the first space, a first pipe interconnecting the second space and the clear water tank, and a second pipe interconnecting the ultraviolet radiation applying unit and the waste liquid tank.

Description

BACKGROUND OF THE INVENTIONField of the Invention[0001]The present invention relates to a processing liquid circulating apparatus for supplying a processing liquid such as pure water to a processing apparatus.Description of the Related Art[0002]For example, a processing liquid circulating apparatus disclosed in JP 2009-190128A or JP 2008-037695A produces clear water free of swarf by storing in a tank a processing waste liquid containing swarf delivered from a processing apparatus and passing the processing waste liquid pumped from the tank by a pump through a filter to remove the swarf from the processing waste liquid. The processing liquid circulating apparatus then applies an ultraviolet radiation to the produced clear water to turn organic substances in the clear water into ions, and passes the clear water through an ion exchange resin to cause the ion exchange resin to adsorb organic substance ions and inorganic substance ions, thereby reproducing the clear water as pure water. ...

AI Technical Summary

Benefits of technology

The present invention provides a processing liquid circulating apparatus that prevents saprophytic bacteria from being multiplied in waste liquid and clear water when the apparatus shuts down for a long period of time. This is accomplished by introducing gas into the waste liquid tank, clear water tank, and the filter unit to prevent ozone vapor from leaking out of the apparatus and potentially exposing operators to danger. Additionally, when the apparatus is ready to deliver pure water again, the clear water in the apparatus can be reused without being discharged.

Problems solved by technology

If the processing liquid circulating apparatus shuts down for a long period of time, saprophytic bacteria are likely to multiply to the extent that they cannot be eliminated by the application of an ultraviolet radiation, and hence, the clear water is not sufficiently sterilized.

Since it is time-consuming to produce pure water by refining city water, a problem arises in that the processing apparatus needs to be left on standby during the refinement of city water.

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