Distance-controlled tunneling transducer and direct access storage unit employing the transducer
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While the invention will be described in connection with the electrostatic deflection of a cantilever beam as conventionally used in micromechanical arrays, it will be obvious to those skilled in the art that the invention is also applicable to piezoceramic scanners.
FIGS. 1 and 2 show the contemplated arrangement of the elements of the transducer in accordance with the invention in a semi-schematical way. Referring to FIG. 1, there is shown a section of the transducer 1 with three tunnel tips 2', 2", 2"' out of a plurality of tunnel tips (or field-emission tips) arranged in an array. The tunnel tips are attached to cantilever beams 3',3",3"' respectively which are formed, e.g. by etching from body 4, FIG. 2, of transducer 1 as an integral part thereof. Transducer 1 is mounted to a conventional xyz-drive 5 which provides lateral deflection as well as coarse approach and adjustment of the average distance between tunnel tip 2 and the oppositely disposed surface 6, by keeping the total...
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