Large power heat gradient chemical gas phase infiltration process system monitoring device and method
A chemical vapor infiltration and process system technology, which is applied in the field of thermal gradient chemical vapor infiltration process system monitoring devices, can solve the problems of heavy responsibility, loss, and high labor intensity of operators, and achieve the effect of convenient management and reduced labor intensity.
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[0021] Device embodiment: Referring to Figure 1, the present invention includes a temperature sensor 5, a pressure sensor 6, a gas signal detector 8, a component damage detector 7, a signal conditioner 10, a flow meter 9, an A / D converter 11, and a monitoring computer 12 , display 13, D / O converter 14, drive amplifying circuit 15, pulse blocking relay 16, intermediate relay 17, alarm relay 18, alarm circuit 20, vacuum switch relay 21; , the rectifier circuit 22, the deposition layer of the prefabricated body 2 in the deposition furnace body 3, and the cooling water pipe 4 of the deposition furnace are connected, and the output end of the temperature sensor 5 is electrically connected with the monitoring computer 12 through the signal conditioner 10 and the A / D converter 11; The detection end of the pressure sensor 6 is respectively connected to the rectifier circuit 22 and the cooling water pipe 4 of the deposition furnace, and its output end is electrically connected to the mo...
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