Electrode for piezoelectric ceramic component and its preparation process

A technology of piezoelectric ceramics and components, which is applied in the field of piezoelectric components and its preparation technology, can solve the problems of low pass rate, poor welding reliability, high product cost, etc., and achieve the problems of poor reliability, uniform coating and reduced processing cost Effect

Inactive Publication Date: 2008-08-13
HUNAN JIAYEDA ELECTRONICS
View PDF2 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] In order to overcome the disadvantages of existing piezoelectric ceramic electrodes using silver material and vacuum-evaporated silver layer, poor welding reliability, low pass rate, expensive magnetron sputtering or ion silver plating equipment, and high product cost,

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Electrode for piezoelectric ceramic component and its preparation process
  • Electrode for piezoelectric ceramic component and its preparation process
  • Electrode for piezoelectric ceramic component and its preparation process

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0014] Embodiment 1: Deposit tin and silver electrode test to ceramic substrate with vapor deposition equipment

[0015] 1. Test conditions: Use TM-800A evaporation equipment to deposit electrode layers on ceramic substrates. The technological parameters of the equipment used are: vacuum degree, 1.5×10 -2 ~3.0×10 -2 Pa; the distance between the evaporation source and the workpiece, 15-30cm; evaporation current: 1000-1600A. Use the above conditions to deposit tin and silver on the ceramic substrate respectively, and see the experimental results for their adhesion:

[0016] 2. Experimental results:

[0017] Tin-plated and silver-plated tension comparison: (unit KG solder joint area is 1mm 2 )

[0018]

1

2

3

4

5

6

7

8

9

10

average

Tin plated porcelain

17.9

18.2

19

18.7

15.6

19.8

17.5

20 ...

Embodiment 2

[0027] Embodiment 2: The preparation method of the tin or tin alloy electrode of the piezoelectric ceramic component of the present invention comprises the following steps:

[0028] ① Manufacture inner layer copper electrodes of piezoelectric ceramic components;

[0029] ②Use the vacuum evaporation method, use the TM-800A vacuum evaporation equipment, and the vacuum degree is 1.5×10 -2 3×10 -2 pa, the distance between the evaporation source and the workpiece is 15-30cm, and the evaporation current is 1000-1600A, deposit metal tin or tin alloy outer electrode on the piezoelectric ceramic inner layer copper electrode, so that the thickness of the tin or tin alloy coating is 0.5~5um;

[0030] ③ When aging the polarized ceramic sheet, the tin or tin alloy electrode is treated with an anti-oxidation process;

[0031] ④ Assembly of piezoelectric ceramic components by chip flip-chip immersion tin welding process;

[0032] ⑤ Inspection and storage.

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

PropertyMeasurementUnit
thicknessaaaaaaaaaa
Login to view more

Abstract

Unlike to prior art, the related tin or tin-alloy electrode of piezoelectric ceramic element in this invention has stretching resistance up to 1.38kg / mm2, needs less cost (reducing 430.6RMB per 100,000 elements), and well performance not inferior to Ag-plated product.

Description

【Technical field】 [0001] The invention relates to an electrode suitable for piezoelectric components and its preparation process, in particular to an electrode suitable for piezoelectric ceramic components and its preparation process. 【Background technique】 [0002] Piezoelectric ceramics are an important class of functional materials. After being processed under certain conditions, this kind of material can realize the mutual conversion between force and electricity. This effect is called "piezoelectric effect or inverse piezoelectric effect". Simply put, if a certain pressure is applied to the ceramic body, a certain amount of charge can be generated in the ceramic body (piezoelectric effect); if a certain electric field is applied to the ceramic body, the ceramic body can be deformed (inverse piezoelectric effect). Piezoelectric ceramic components utilize the unique piezoelectric / inverse piezoelectric effect of piezoelectric ceramics, and are widely used in modern electr...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
Patent Type & Authority Patents(China)
IPC IPC(8): H01L41/047
Inventor 刘志潜陈普查张强冯迅刘超慧陈强
Owner HUNAN JIAYEDA ELECTRONICS
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap