Multistation coating device and method for plasma coating
A technology of plasma coating and coating device, which is applied to the device, chemical instrument and method, coating and other directions for coating liquid on the surface, which can solve the problems of difficulty in clamping and limit the production capacity of continuous transportation, and achieve small motion quality. , the effect of small dead volume
Inactive Publication Date: 2008-08-20
SCHOTT AG
View PDF8 Cites 0 Cited by
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
[0005] However, the disadvantage of such a structure is that the container to be processed must be transported to the hollow chamber along two mutually perpendicular directions with complex movements, and the container is completely covered by the hollow chamber wall in the hollow chamber except in the closed state where the opening is covered by the cover. Surrounding and therefore difficult to hold for onward transport after coating
Furthermore, the possible production capacity is limited by such a device, since the movement process of each individual container must be repeated for each coating process
Method used
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View moreImage
Smart Image Click on the blue labels to locate them in the text.
Smart ImageViewing Examples
Examples
Experimental program
Comparison scheme
Effect test
Embodiment Construction
[0082] FIG. 1A shows a schematic cross-sectional view of an embodiment of a coating device according to the invention, which is generally designated 1 . The coating device 1 comprises a reactor 18 and a device 2 for the input of electromagnetic energy, wherein the reactor 18 comprises a base element 33, which in this embodiment has the form of a bottom plate, and a movable sleeve element 19. The movable sleeve element 19 may for example have the form of a cylindrical chamber wall.
[0083] In the combined position, as shown in FIG. 1 , two sealed coating chambers 15 , 17 are formed between the sleeve element 19 and the base element 33 , which each form a coating station 12 for a workpiece. Or 14, where electromagnetic energy is input to induce plasma for coating. In the exemplary embodiment shown in FIG. 1, therefore, two workpieces can be processed simultaneously. Interaction of the individual plasmas during the coating process is avoided by the separation of the individua...
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More PUM
Login to View More Abstract
A coating apparatus is provided for simplifying the introduction and removal of workpieces into and from a reactor for plasma coating and to increase the throughput. The coating apparatus has a reactor with a moveable sleeve part and a base element, at least one sealed coating chamber being defined between sleeve part and base element when the latter two parts are fitted onto one another. The coating apparatus also has a device for introducing electromagnetic energy into the at least one coating chamber. The reactor has at least two coating places.
Description
technical field [0001] The invention relates to a coating device and method for performing plasma coating on workpieces, in particular to a coating device and method with multiple coating positions for simultaneously coating multiple workpieces. Background technique [0002] The barrier properties of plastic containers, such as plastic bottles, can be greatly improved by providing a barrier layer on the inner or outer surface of such containers. In this way, for example, foodstuffs can be protected from the effects of oxygen, which diffuses through most plastics. [0003] Such coatings can be deposited on container walls in particular by means of various CVD methods (CVD: "Chemical Vapor Deposition", chemical vapor deposition). For this purpose, the plasma is generally ignited at low pressure in a gas atmosphere with a precursor gas. The reaction products formed in the plasma are then deposited on the workpiece to be treated as a coating. The low-pressure atmosphere requi...
Claims
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More Application Information
Patent Timeline
Login to View More Patent Type & Authority Patents(China)
IPC IPC(8): C23C16/04C23C16/50B05D7/24C03C17/00B08B7/00B08B9/42B29C49/42B65D23/02B65G29/00C08J9/00C23C14/04C23C14/50C23C14/56C23C16/40C23C16/44C23C16/455C23C16/458C23C16/511C23C16/54
CPCB29C49/421C23C16/458C23C14/56C23C16/54B08B7/00C23C16/401C23C16/4412C23C16/455C23C14/505H01J37/32733C08J9/0004B65G2201/0244B65D23/02B05D1/62C03C17/005C23C16/511B65G29/00C23C16/50C23C16/4409C23C16/045B29C2049/4221B29C2791/001B08B9/426C08J2300/14C23C14/046B29C49/42105B29C49/42069B29C49/42073B29C49/42075B29C49/42095B29C49/42115B29C49/42384B29C49/6835
Inventor 斯特凡·贝勒安德烈亚斯·吕特林豪斯-亨克尔格雷戈尔·阿诺尔德马蒂亚斯·比克尔马滕·瓦尔特于尔根·克莱因
Owner SCHOTT AG