Array vertical cavity-surface transmission laser confocal microscopic system
A vertical cavity surface emission, confocal microscopy technology, applied in instruments, optical devices, measuring devices, etc., can solve the problems of unsuitable free-form surface measurement, measurement speed and measurement range limitations, and reduce vibration and increase measurement range. Effect
Inactive Publication Date: 2009-03-18
TSINGHUA UNIV
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Problems solved by technology
Although these methods and instruments have high measurement accuracy, their measurement speed and measurement range are limited, and they are not suitable for the measurement of free-form surfaces.
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[0022] The invention provides an array type vertical cavity surface emitting laser confocal microscope system based on multi-point scanning of two-dimensional surface array light sources. The vertical cavity surface emitting laser confocal microscope system includes three parts: light source, measurement and signal processing:
[0023] The light source part is a vertical cavity surface emitting laser array, and its driving power is driven by a DC power supply, driven by a switch control one by one, or a linear frequency modulation power supply. The former two are used to realize the measurement of a traditional confocal system; Through linear frequency modulation of the vertical cavity surface emitting laser, the absolute distance measurement is realized to increase the measurement range of the instrument; the vertical cavity surface emitting laser array light source can emit light one by one or at the same time;
[0024] The signal processing part includes:
[0025] An optic...
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Present invention discloses array vertical cavity surface emission laser confocal microscopic system belonging to surface topography measuring technique. It contains light source, measurement and processing, wherein light source being vertical cavity surface emission laser array to realize character extraction to workpiece surface corresponded each measuring point, signal processing part consisting of optical signal receiver and work control computer, measurement part including beam extend collimating lens, spectroscope and one long tube micro objective. System uses optical scanning method partially substituting workbench mechanical type scanning in tradition instrument, thereby reducing vibration interference and raising detection speed. Absoluteness distance measurement can b realized for increasing measuring range Through increasing vertical cavity surface emission laser linear frequency modulation and phase-detecting means. Said system can be widely used in different kinds of free curved face, micro - mechanical MEMS device, micro-electronics mask, biochips etc precision surficial measurement.
Description
technical field [0001] The invention belongs to the technical field of surface topography measurement. In particular, it relates to arrayed vertical cavity surface emitting laser confocal microscopy systems. Background technique [0002] In today's booming manufacturing industry, micro-nano precision metrology technology has been widely used in various fields including aerospace, semiconductor industry, micro-electro-mechanical system MEMS, microelectronic mask plates, biochips, etc. The measurement of surface topography has long-term Since then, it has been a hot spot in the field of precision measurement. A free-form surface is a special surface, which refers to an asymmetric, irregular surface that is not suitable to be described by a unified equation. Free-form optical components have become key components used in the optoelectronic information industry. In addition, the artificial joint surface is also a typical free-form surface, and its research occupies an importa...
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IPC IPC(8): G01B9/04G01B11/24
Inventor 林德教刘音闫聚群李岩殷纯永
Owner TSINGHUA UNIV