A low-coherence interferometric absolute distance measurement system based on wavenumber resolution
A low-coherence interference and absolute distance technology, applied in the field of optical measurement, can solve problems such as small measurement range, affecting the accuracy of measurement results, and inability to measure absolute distances, and achieve the effect of improving anti-interference ability
Inactive Publication Date: 2017-11-14
BEIJING JIAOTONG UNIV
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Problems solved by technology
[0015] 1. The measurement range is limited by the wavelength λ of the incident light wave, the measurement range is very small, only λ / 2, and the displacement with a span greater than λ / 2 cannot be measured
[0016] 2. Absolute distance measurement cannot be performed
[0017] 3. The spectral drift of the light source will affect the accuracy of the measurement results
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[0031] Attached below image 3 The present invention will be further described with specific embodiments.
[0032] like image 3 As shown, a low-coherence interference absolute distance measurement system based on wavenumber resolution consists of a broadband light source S1, a fiber isolator GL, a 3dB-coupler N, an autocollimator G3, an autocollimator G4, and an autocollimator G5 , fiber grating FBG, measuring mirror G1, reference mirror G2, detector PD, circulator H, diffraction grating DG, lens L, linear array detector CCD, piezoelectric ceramic PZT, feedback control circuit B1, A / D conversion card B2 , computer B3 and result output module B4.
[0033]The light emitted by the broadband light source S1 is divided into two paths after passing through the fiber isolator GL and the 3dB-coupler N. After being collimated by the self-collimating mirror G3 and the self-collimating mirror G4, the two paths of light are respectively vertically incident on the measuring mirror On G...
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The invention discloses a low-coherence interference absolute distance measurement system based on wave number resolution, which belongs to the technical field of optical measurement. The system consists of broadband light source, optical fiber isolator, 3dB-coupler, autocollimation mirror, fiber grating, measuring mirror, reference mirror, detector, circulator, grating, lens, linear array detector, piezoelectric ceramics, feedback It consists of control, A / D conversion card, computer and result output. The light emitted by the broadband light source passes through the interferometer to obtain the measured information, and the grating disperses the wide-spectrum interference signal output by the interferometer into a light sheet with continuous wavelength distribution in space, which is detected by a linear array detector. The interference signal detected by each pixel of the linear array detector is converted into a corresponding wavenumber interference signal. The wavenumber change between two adjacent peaks is proportional to the absolute value of the interferometer optical path difference, and the distance between two adjacent peaks is measured. The amount of change in wave number between, that is, the absolute value of the measured value is measured. Feedback control compensates for environmental disturbances making the measurement system suitable for on-line measurements.
Description
technical field [0001] The invention relates to the field of optical measurement, in particular to a low-coherence interference absolute distance measurement system based on wave number resolution. Background technique [0002] The existing literature close to this technology has the following two: [0003] [1] D.P.Hand, T.A.Carolan, J.S.Barton and J.D.C.Jones. "Profilemeasurement of optically rough surfaces by fiber-optic interferometry", Opt.Lett., Vol.18, No.16, 1993, P.1361-1363.( Optics Letters (Optics Letters), Volume 18, Issue 16, P.1361-1363) [0004] The technical principle of literature [1] is as follows: figure 1 shown. [0005] The light emitted by the semiconductor laser passes through the Faraday isolator and the fiber 3dB-coupler, and then reaches the measuring head. The measuring head is a Fizeau interferometer. A part of the light is reflected by the end face of the fiber as the reference light, and the other part of the light is focused by the self-focus...
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IPC IPC(8): G01B11/02
Inventor 谢芳赵可强马森王韵致
Owner BEIJING JIAOTONG UNIV