Conveying device

Abstract

The present invention provides a conveying device, which is a conveying mechanism that conveys a strip-shaped workpiece in a stable state without applying a load. The supply reel rotation part (1) of the conveying mechanism (A) is arranged at a position higher than the first guide roller (2) on the supply side, and the second guide roller (3) on the supply side is arranged at a position opposite to the first guide roller (3) on the supply side. The guide rollers (2) are at the same or lower position, and the second guide roller (3) on the supply side is arranged at a position higher than the first conveying roller (4), and the winding reel rotating part (9 ) is arranged at a position higher than the second guide roller (8) on the winding side. The second guide roller (8) on the winding side is arranged at the same or higher position as the first guide roller (7) on the winding side, and the second guide roller (8) on the winding side is arranged on A position lower than the winding reel rotating part (9). The first conveyance roller (4) and the second conveyance roller (6) are provided with an adsorption unit (42) for adsorbing a workpiece to a roller surface (41a).

Description

technical field [0001] The present invention relates to a conveying device that conveys a film-shaped tape workpiece to a processing unit from a supply side, and conveys the workpiece processed by the processing unit to a winding side. Background technique [0002] In general, electrical circuit base materials used for circuit boards (printed circuit boards) of various small electrical equipment such as mobile phones and mobile devices are difficult to use thick plate-shaped materials in the manufacturing process because the body is light, thin and short. Therefore, it has to be processed with a thin, high-precision film-like tape (hereinafter referred to as a workpiece). [0003] In such a work, the thickness of the blank actually used is about 0.1 mm in the prior art, and it tends to become thinner to 0.06 mm in recent years. And recently, it is desired to use thin and wide strip-shaped workpieces with a thickness of 0.05 mm or less and a width of 100 to 250 mm. [0004]...

AI Technical Summary

Problems solved by technology

[0018] However, in such a transfer mechanism, the workpiece is horizontal on the exposure stage, and the mask is in contact with the workpiece, so as the workpiece becomes thinner and wider, its own weight increases and tends to slack, so there is a problem that the slack cannot be eliminated

[0019] Moreover, in such a conveying mechanism, since the mask and the workpiece are in close contact or in close contact, dust and the like may adhere to the mask and the workpiece due to static electricity and be transferred. The problem of reduced resolution

[0020] In addition, in the transfer mechanism of Patent Document 2 to Patent Document 4, the front and rear positions of the exposure table are held by the pressing rollers that clamp both sides of the workpiece, and the mask, the optical system, and the workpiece can be aligned smoothly. , but since both sides of the workpiece are clamped, there is a problem of excessive load acting on the workpiece

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