Exhaust push car for processing panel

Abstract

An exhaust trammer for panel processing comprises a panel holding frame (20) which laminates panels (P) on the trammer body (10) in a multi-layer type and holds the panels, and an exhaust processing component of an exhaust head (34) for holding an end tube (33) performing seal and exhaust processing in the panels, a cooled water gathering introduction tube (37) and a cooled water gathering discharge tube (38) in a heat box (35) arranged near the panel holding frame, guide tubes (37a, 38a) guided from the cooled water gathering introduction tube and the cooled water gathering discharge tube areconnected to the exhaust heads respectively, on the other hand, vent-pipes (36d) for exhaust in the panels and high-pressure air guide tubes (36c) which guides compressed air for holding the end tubeon the exhaust head are provided outside the heat box. In this way, the multi-layer type laminated panels can be introduced into a processing furnace, and the exhaust trammer for panel processing which performs seal exhaust processing in the panels is miniaturized, various cost can be reduced.

Description

[0001] This application claims priority based on Japanese Patent Application No. 2006-36085. technical field [0002] The present invention relates to an exhaust cart for panel processing used when panels such as plasma display panels are stacked in layers and then introduced into a processing furnace to seal and exhaust the inside of each panel. In particular, it relates to an exhaust cart for panel processing characterized in that the exhaust cart for panel processing can be downsized to reduce various costs. Background technique [0003] Conventionally, when sealing and degassing a panel such as a plasma display panel, as disclosed in Japanese Patent Laying-Open No. 2003-146409 and Japanese Patent Laid-Open No. 2004-127900, the above-mentioned panels are laminated in layers. On the exhaust cart for panel processing, each stacked panel is introduced into the processing furnace by using the exhaust cart for panel processing, and each panel is sealed and exhausted. [0004]...

AI Technical Summary

Problems solved by technology

[0008] However, as mentioned above, if a lot of pipes 36a to 36d are arranged inside the heat-insulating box 35, there is a problem that the heat-insulating box 35 will become larger, and since the cooling water introduced into the cooling water in each exhaust head 34 The independent introduction pipe 36a and the exhaust pipe 36d for vacuum exhausting treatment of each panel P are housed together in the heat insulation box 35, so the heat of the exhaust pipe 36d will be transferred to the independent cooling water introduction pipe 36a, so that The temperature of the cooling water rises, thereby deteriorating the heat insulation efficiency of the heat insulation box 35

[0009] In addition, as described above, since the large heat shield box 35 is provided on the cart body 10, there is also a problem that the cart body 10 becomes larger, which increases the size of the exhaust cart for panel processing, and its manufacturing cost is high. , and when each panel P stacked in the panel processing exhaust trolley is introduced into the processing furnace for sealing and exhausting treatment, the heat treatment efficiency is low and the operating cost is high

[0011] However, even if the two panel holding frames 20 and the exhaust gas treatment member are separately provided on the cart body 10, as mentioned above, since the heat insulation box 35 is large, the same problem as the above case still exists, and it is not possible to obtain a good performance. Effect

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