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Vacuum deshydroxy method for quartz glass cell

A quartz glass tube and vacuum dehydrogenation furnace technology, which is applied in glass forming, glass manufacturing equipment, manufacturing tools, etc., can solve the problems of poor dehydration effect and easy damage to quartz glass tubes, and reduce high-temperature deformation rate and process The process is smooth and orderly, and the effect of improving thermal stability

Inactive Publication Date: 2007-10-10
徐胜利
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The dehydroxylation process in the prior art generally adopts the linear heating method, the steps are too simple, the dehydroxylation process is easy to damage the quartz glass tube, and the dehydroxylation effect is relatively poor. Generally, the hydroxyl content of the quartz glass tube can only be reduced to about 20ppm. Cannot meet the requirements of low hydroxyl industries such as semiconductor technology

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0037] Example 1. A kind of vacuum dehydration method of quartz glass tube, it adopts 12 steps dehydroxylation method, and its steps are as follows:

[0038] The first step: take 50 minutes to raise the temperature in the vacuum dehydration furnace to 600°C;

[0039] Step 2: Keep the temperature in the vacuum dehydration furnace at 600°C for 5 minutes;

[0040] The third step: take 20 minutes to raise the temperature in the vacuum dehydration furnace to 800°C;

[0041] Step 4: Keep the temperature in the vacuum dehydration furnace at 800°C for 10 minutes;

[0042] Step 5: Take 20 minutes to raise the temperature in the vacuum dehydration furnace to 950°C;

[0043] Step 6: Keep the constant temperature in the vacuum dehydration furnace at 950°C for 5 minutes;

[0044] Step 7: It takes 90 minutes to raise the temperature in the vacuum dehydration furnace to 1180°C;

[0045] Step 8: Keep the temperature in the vacuum dehydration furnace at 1180°C for 240 minutes;

[0046] S...

Embodiment 2

[0051] Example 2. In Example 1, the vacuum degree in the vacuum dehydration furnace was 6×10 during dehydration. -3 .

Embodiment 3

[0052] Example 3. A kind of vacuum dehydration method of quartz glass tube, it adopts 12 steps dehydroxylation method, and its steps are as follows:

[0053] The first step: take 30 minutes to raise the temperature in the vacuum dehydration furnace to 500°C;

[0054] Step 2: Keep the temperature in the vacuum dehydration furnace at 500°C for 10 minutes;

[0055] The third step: take 10 minutes to raise the temperature in the vacuum dehydration furnace to 700°C;

[0056] Step 4: Keep the temperature in the vacuum dehydration furnace at 700°C for 15 minutes;

[0057] Step 5: Take 10 minutes to raise the temperature in the vacuum dehydration furnace to 900°C;

[0058] Step 6: Keep the temperature in the vacuum dehydration furnace at 900°C for 10 minutes;

[0059] Step 7: Take 60 minutes to raise the temperature in the vacuum dehydration furnace to 1050°C;

[0060] Step 8: Keep the temperature in the vacuum dehydration furnace at 1050°C for 300 minutes;

[0061] Step 9: Redu...

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Abstract

This invention discloses a method for removing hydroxyls from quartz glass tube in vacuum. The method adopts 12 steps to realize hydroxyl removal from quartz glass tube by adjusting current and voltage. The method can retain or improve the thermal stability of quartz glass tube, improve the heat resistance and crack resistance of quartz glass tube, reduce the high-temperature deformation rate of quartz glass tube, and improve the adaptability of quartz glass tube. After treatment, the hydroxyl content in quartz glass tube is reduced to below 2 ppm. The high-temperature deformation rate of quartz glass tube is low, and the high-temperature deformation rate of quartz glass tube with a diameter below 120 mm is within 3%, which can satisfy the requirement of semiconductor filed for large-diameter quartz glass tube.

Description

technical field [0001] The invention relates to a production method of a quartz glass tube, in particular to a vacuum dehydration method of the quartz glass tube. Background technique [0002] The quartz glass tube produced by the continuous melting process usually contains 100-180ppm of hydroxyl groups. High hydroxyl content will directly affect the quality of the quartz glass tube, so it needs to be dehydroxylated. The dehydroxylation process in the prior art generally adopts the linear heating method, the steps are too simple, the dehydroxylation process is easy to damage the quartz glass tube, and the dehydroxylation effect is relatively poor. Generally, the hydroxyl content of the quartz glass tube can only be reduced to about 20ppm. It cannot meet the requirements of low-hydroxyl industries such as semiconductor technology. Contents of the invention [0003] The technical problem to be solved by the present invention is to provide a vacuum dehydroxylation method for...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C03B20/00
CPCC03B20/00C03B32/00
Inventor 徐胜利
Owner 徐胜利
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