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High precision double frequency laser interferometer signal subdivision system

A dual-frequency laser interference and signal subdivision technology, applied in instruments, optical devices, measurement devices, etc., can solve the problems of limited measurement target speed and extremely limited improvement in measurement accuracy, and achieve high accuracy and strong anti-interference. Ability, high precision effect

Inactive Publication Date: 2007-10-10
INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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Problems solved by technology

The traditional subdivision method is either limited by electronic devices or the speed of the measurement target, and the digital phase detection subdivision method based on pulse filling is also limited by many factors, so the improvement of measurement accuracy is extremely limited

Method used

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  • High precision double frequency laser interferometer signal subdivision system
  • High precision double frequency laser interferometer signal subdivision system
  • High precision double frequency laser interferometer signal subdivision system

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Embodiment Construction

[0010] As shown in Figure 1, the embodiment of the present invention consists of a measurement signal preprocessing circuit 1, a reference signal preprocessing circuit 2, a digital phase detection circuit 3, a clock signal generation circuit 4 with a period of T1, a clock front edge coincidence detection circuit 5, and a period of T1 The clock signal generation circuit 6 of T2, the counter 7, the counter 8 and the operation processing circuit 9 are composed, the measurement signal preprocessing circuit 1 and the reference signal preprocessing circuit 2 respectively complete the photoelectric detection, amplification, filtering and shaping of the measurement signal and the reference signal, The output is two digital square wave signals, which are sent to the digital phase detection circuit 3 for digital phase detection, and the output is a digital pulse signal with a certain width; the rising edge of the output signal of the digital phase detection circuit 3 drives the clock sign...

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Abstract

A signal subdivision system of high-accuracy double frequency laser interferometer comprises preprocessing circuit of measurement signal, preprocessing circuit of reference signal, digital phase demodulation circuit, clock signal generating circuit with cycle of T1, detection circuit of clock leading edge coincidence, clock signal generating circuit with cycle of T2, counter and operation treatment circuit for obtaining high accuracy of subdivision.

Description

technical field [0001] The invention is a high-precision signal subdivision system, which is applied to a dual-frequency laser interferometer and can be widely used in online displacement measurement, error correction and control of ultra-large-scale integrated circuit processing equipment, precision machining equipment, and the like. Background technique [0002] Dual-frequency laser interferometer is the most authoritative length measuring instrument in the industry. It is widely used in online displacement measurement and control of various precision equipment. It is an indispensable key measurement tool for VLSI processing equipment and precision machinery industry. However, if the output signal of the dual-frequency laser interferometer is not subdivided, the final measurement accuracy can only reach one-half of the wavelength of the laser light source, and the resolution requirements cannot be met in many occasions, especially in VLSI processing equipment. middle. The...

Claims

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Application Information

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IPC IPC(8): G01B9/02G01B11/00
Inventor 邓玖根唐小萍胡松张正荣邢薇严伟
Owner INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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