High precision double frequency laser interferometer signal subdivision system
A dual-frequency laser interference and signal subdivision technology, applied in instruments, optical devices, measurement devices, etc., can solve the problems of limited measurement target speed and extremely limited improvement in measurement accuracy, and achieve high accuracy and strong anti-interference. Ability, high precision effect
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[0010] As shown in Figure 1, the embodiment of the present invention consists of a measurement signal preprocessing circuit 1, a reference signal preprocessing circuit 2, a digital phase discrimination circuit 3, a clock signal generation circuit 4 with a period of T1, a clock leading edge coincidence detection circuit 5, and a period of T2 consists of clock signal generating circuit 6, counter 7, counter 8 and arithmetic processing circuit 9. Measurement signal preprocessing circuit 1 and reference signal preprocessing circuit 2 respectively complete the photoelectric detection, amplification, filtering and shaping of measurement signals and reference signals. The output is two digital square wave signals, which are sent to the digital phase detection circuit 3 for digital phase detection, and the output is a digital pulse signal of a certain width; the rising edge of the output signal of the digital phase detection circuit 3 drives the clock signal generating circuit 4 with a pe...
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