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Macromolecule resistance type humidity sensor element and its production method

A humidity sensor and manufacturing method technology, applied in the direction of material resistance, etc., can solve the problems of poor consistency of polymer temperature sensors, unsatisfactory long-term reliability, hindering practical application, etc., achieve excellent long-term stability, simple and reliable manufacturing process, The effect of good chemical atmosphere resistance

Inactive Publication Date: 2007-10-24
BEIJING YADU INDOOR ENVIRONMENT PROTECTION TECH
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  • Abstract
  • Description
  • Claims
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AI Technical Summary

Problems solved by technology

However, polymer temperature sensors generally have disadvantages such as poor consistency, unsatisfactory long-term reliability, poor resistance to high humidity, and intolerance to chemical atmospheres.
has restricted and hindered its practical application and further development for many years

Method used

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  • Macromolecule resistance type humidity sensor element and its production method
  • Macromolecule resistance type humidity sensor element and its production method
  • Macromolecule resistance type humidity sensor element and its production method

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Embodiment Construction

[0029] Preferred embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings.

[0030] Fig. 3 is a cross-sectional view after electrodes are arranged on the upper and lower surfaces of the ceramic substrate and immersed in a moisture-sensitive medium, Fig. 4 is a top view of the humidity sensor element of the present invention, and Fig. 5 is a side view of the humidity sensor element of the present invention. As shown in Fig. 3, Fig. 4 and Fig. 5, polymer resistance type humidity sensor element of the present invention comprises:

[0031] The porous ceramic substrate 1, the electrode 2 and the three-dimensional humidity sensitive film 3 also include soldered pins 4. In the present embodiment, the porous ceramic substrate 1 is a silicon dioxide-doped aluminum oxide porous ceramic substrate (but not limited thereto, it can also be known to those skilled in the art and can be used for humidity sensors Any porous ceramic ma...

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Abstract

The invention provides a macromolecule resistance humidity sensor and a relative production, wherein the macromolecule resistance humidity sensor comprise a porous ceramic base which upper and lower surfaces are respectively distributed with upper and lower surface electrodes, the surface electrodes are connected with lead wires, the holes on the porous ceramic base are immerged with humidity-sensitive medium, to form a solid humidity sensitive membrane. The inventive macromolecule resistance humidity sensor has simple and reliable production, low cost, non special device demand, batch production application, high output linearity, little humidity hysteresis return difference, high temperature resistance, high consistence, high stability for long time and better chemical gas resistance.

Description

technical field [0001] The invention relates to a humidity sensor, in particular to a polymer resistance type humidity sensor element and a manufacturing method thereof. Background technique [0002] Today, human beings have entered the information age, how to truly and quickly understand and process all kinds of information has become an urgent need of society and people. As a device for capturing information, sensors develop rapidly and occupy a very important position in the development of science and technology in the modern high-speed information society. Humidity sensors are an important class of chemical sensors, which are widely used in storage, industrial production, process control, environmental monitoring, household appliances, and meteorology. At present, polymer humidity sensors have been applied in many fields due to their small size, high sensitivity, and fast response. Among them, the polymer resistive humidity sensor has become a research hotspot because ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N27/12
Inventor 何鲁敏
Owner BEIJING YADU INDOOR ENVIRONMENT PROTECTION TECH
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