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Method and apparatus for inspection automatically focusing non-spherical surface

A technology of autofocus and surface detection, which is applied in the direction of measuring devices, optical devices, and testing optical properties, can solve the problems of accuracy and simplicity that cannot meet the requirements of high-precision aspheric surface detection, and achieve great research value and feasibility , high measurement accuracy, simple and reliable device

Inactive Publication Date: 2007-11-21
XIAMEN UNIV
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Problems solved by technology

[0003] Qiao Yujing et al. (Qiao Yujing, Lv Ning. Aspheric Surface and Aspheric Surface Measurement Technology, Journal of Harbin University of Commerce, 2005, 21(3): 357-361) introduced several existing aspheric surface detection methods, but these methods are inaccurate and In terms of simplicity and ease of use, it can no longer meet the detection requirements of high-precision aspheric surfaces

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  • Method and apparatus for inspection automatically focusing non-spherical surface
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  • Method and apparatus for inspection automatically focusing non-spherical surface

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Embodiment Construction

[0027] The following embodiments will further illustrate the present invention in conjunction with the accompanying drawings.

[0028] Referring to Fig. 1 and 2, the aspherical surface detection autofocus device of the embodiment of the present invention is provided with focusing head 2, I / V amplifier 3, single-chip microcomputer 4, optocoupler isolation device 5, servo amplifier 6, servo motor 7, grating ruler 8 and computer9. The focusing head 2 is provided with a barrel 11, a laser 12, a mirror 13, an eyepiece 14, an objective lens 15, and a photodetector 16. The barrel 11 and the grating scale 8 are connected as one, and are connected to the output shaft of the servo motor 7 through a screw. .

[0029] When the aspheric surface measured workpiece 1 on the workpiece table 10 was placed on the focus of the eyepiece 14 of the focus head, the photodetector 16 output current of the focus head processed the analog input I of the single-chip microcomputer 4 by the I / V amplifier ...

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Abstract

An automatic-focusing method of aspheric surface detection includes using focal point of eye lens as original point of coordinate to confirm coordinate of output optical axis on laser and eye lens to optical axis of objective lens, calculating out position A and position B of light spot on photoelectric detector, calculating out distance D of reflection point relatively to focal point of eye lens after focusing head is translated, carrying out rough and fine regulation and fetching total displacement of grating rule to finalize measurement after focusing is succeeded. The device used for realizing said method is also disclosed.

Description

technical field [0001] The invention relates to a detection of an aspheric element, in particular to a method and a device for detecting the surface of an aspheric optical element with closed-loop control and non-contact autofocus. Background technique [0002] Aspherical optical components are more and more widely used in military fields such as national defense and aviation, and civilian fields such as electronic information products. Detection technology has always been the main bottleneck for improving product manufacturing accuracy. [0003] Qiao Yujing et al. (Qiao Yujing, Lv Ning. Aspheric Surface and Aspheric Surface Measurement Technology, Journal of Harbin University of Commerce, 2005, 21(3): 357-361) introduced several existing aspheric surface detection methods, but these methods are inaccurate and In terms of simplicity and ease of operation, it can no longer meet the detection requirements of high-precision aspheric surfaces. [0004] Liang Cuiping et al. (Lia...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/24G01M11/02
Inventor 郭隐彪魏丽珍王丹凤
Owner XIAMEN UNIV
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