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Hartmann wavefront sensor capable of eliminating self-stray light of system

A technology for eliminating system and stray light, which is applied in the direction of transmitting sensing components, optics, instruments, etc. by using optical devices, can solve problems such as large measurement errors, improve measurement accuracy, and prevent stray light from entering the microlens array.

Inactive Publication Date: 2007-11-28
INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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Problems solved by technology

However, due to the presence of multiple lenses in the measurement optical path, the stray light reflected by multiple mirrors will enter the microlens array, resulting in a large measurement error, especially in the case where the measured part is not coated, the measured light beam at this time On the same order of magnitude as stray light intensity

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  • Hartmann wavefront sensor capable of eliminating self-stray light of system
  • Hartmann wavefront sensor capable of eliminating self-stray light of system

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Embodiment Construction

[0009] As shown in Figure 1, after the light emitted by the measurement light source system 4 passes through the polarizer 1, it passes through the beam splitter 6, the beam matching system 5, After the wave plate 2 exits from the system. When working, the light beam emitted by the system will return to the inside of the system after passing through the surface of the tested part, and then pass through the beam reduction system 5, After the wave plate 2 and the beam splitter 7, the beam is irradiated onto the microlens array 7, and finally imaged on the CCD 8. in The center wavelength corresponding to the wave plate corresponds to the light emitted by the measurement light source system, and the polarization analysis direction of the polarizer and the polarization direction of the polarizer are perpendicular to each other.

[0010] Fig. 2 is a principle diagram of eliminating stray light by using the present invention. First, the light emitted by the measuring light sou...

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Abstract

The invention relates to a Hartmann wave-front sensor eliminating astigmatism of system itself, comprising measuring light source system, beam matching system, micro-lens array and CCD. Polarizer is set at the front of light outlet of measuring light source system and 1 / 4 wave plate is set between beam matching system and measured part. Polaroid analyzer is set at the front of micro-lens array and the polarizing detecting direction of Polaroid analyzer is vertical with the polarizing direction of polarizer. Light emitted by the measuring light source system becomes linear polarized light by the polarizer and after the linear polarized light passes through the beam matching system it becomes circular polarized light. After it passes trough measured part it returns system. After 1 / 4 wave plate circular polarized light becomes linear circular polarized light. Here polarized direction is vertical with the polarized direction when it is emitted by polarizer. After beam matching system and Polaroid analyzer, it enters into micro-lens array to measure. The invention decreases centroid calculation error generated by stray light and improves measuring accuracy.

Description

technical field [0001] The invention relates to a wavefront sensor for detecting light wavefronts, in particular to a Hartmann wavefront sensor capable of eliminating the system's own stray light. Background technique [0002] At present, when the Hartmann wavefront sensor is working, the light emitted by the measurement light source system passes through the matching system, and then returns to the system after passing through the device under test; after passing through the beam shrinking system and the microlens array, it is irradiated on the CCD. However, due to the presence of multiple mirrors in the measurement optical path, the stray light reflected by multiple mirrors will enter the microlens array, resulting in a large measurement error, especially in the case where the measured part is not coated, the measured light beam at this time It is on the same order of magnitude as the intensity of stray light. Contents of the invention [0003] The technology of the pre...

Claims

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Application Information

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IPC IPC(8): G01D5/26G02B27/28
Inventor 饶学军李华强王成饶长辉
Owner INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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