Hartmann wavefront sensor capable of eliminating self-stray light of system

A technology for eliminating system and stray light, which is applied in the direction of transmitting sensing components, optics, instruments, etc. by using optical devices, can solve problems such as large measurement errors, improve measurement accuracy, and prevent stray light from entering the microlens array.
CN101078636AInactive Publication Date: 2007-11-28INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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Patent Information

Authority / Receiving Office
CN · China
Current Assignee / Owner
INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
Publication Date
2007-11-28
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention relates to a Hartmann wave-front sensor eliminating astigmatism of system itself, comprising measuring light source system, beam matching system, micro-lens array and CCD. Polarizer is set at the front of light outlet of measuring light source system and 1 / 4 wave plate is set between beam matching system and measured part. Polaroid analyzer is set at the front of micro-lens array and the polarizing detecting direction of Polaroid analyzer is vertical with the polarizing direction of polarizer. Light emitted by the measuring light source system becomes linear polarized light by the polarizer and after the linear polarized light passes through the beam matching system it becomes circular polarized light. After it passes trough measured part it returns system. After 1 / 4 wave plate circular polarized light becomes linear circular polarized light. Here polarized direction is vertical with the polarized direction when it is emitted by polarizer. After beam matching system and Polaroid analyzer, it enters into micro-lens array to measure. The invention decreases centroid calculation error generated by stray light and improves measuring accuracy.
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Description

technical field

[0001] The invention relates to a wavefront sensor for detecting light wavefronts, in particular to a Hartmann wavefront sensor capable of eliminating the system's own stray light. Background technique

[0002] At present, when the Hartmann wavefront sensor is working, the light emitted by the measurement light source system passes through the matching system, and then returns to the system after passing through the device under test; after passing through the beam shrinking system and the microlens array, it is irradiated on the CCD. However, due to the presence of multiple mirrors in the measurement optical path, the stray light reflected by multiple mirrors will enter the microlens array, resulting in a large measurement error, especially in the case where the measured part is not coated, the measured light beam at this time It is on the same order of magnitude as the intensity of stray light. Contents of the invention

[0003] The technology of the pre...

Claims

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