Microelectron mechanical microwave signal phase detector and method for preparing the same
A phase detector, micro-electromechanical technology, applied in the phase angle between voltage and current, generator/motor, piezoelectric/electrostrictive/magnetostrictive devices, etc., can solve the problem of DC power consumption, measurement signal Problems such as small bandwidth and low measurement accuracy can achieve the effect of improving the dynamic range, reducing the influence of inaccurate measurement power, and weakening the requirements
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[0042] The microelectromechanical microwave signal phase detector of the present invention takes GaAs substrate as the substrate, and the specific implementation scheme is as follows:
[0043] On the substrate 1 are provided a first fixed beam structure a, a second fixed beam structure b, a third fixed beam structure c, a fourth fixed beam structure d, a first power splitter e, and a second power splitter Device f, first power combiner g, second power combiner h, first 45° phase shifter i, second 45° phase shifter j:
[0044] The first fixed-supported beam structure a, the second fixed-supported beam structure b, the third fixed-supported beam structure c, and the fourth fixed-supported beam structure d use gallium arsenide as the lining 1 and have a CPW in the middle of the substrate 1 The signal line 14 is provided with the ground wire 3 of the CPW on both sides of the signal line 14 of the CPW, and the sensing electrodes 4 are respectively arranged on both sides of the grou...
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