Uniaxial micro-tensile test piece for thin film mechanical performance test

A micro-stretching and thin-film technology, which is applied in the field of uniaxial micro-stretching specimens, can solve the problems of non-silicon materials that are not suitable for measuring large plastic deformation, unsuitable for routine operations, and limited application scope, and achieves high yield, High verticality and the effect of solving measurement errors

Inactive Publication Date: 2008-03-26
SHANGHAI JIAO TONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Its disadvantage is that it is not suitable for measuring non-silicon materials with large plastic deformation due to the high rigidity of the support beam of the micro-tensile sam

Method used

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  • Uniaxial micro-tensile test piece for thin film mechanical performance test

Examples

Experimental program
Comparison scheme
Effect test

Example Embodiment

[0021] Example 1 has a micro-tensile test piece structure with a U-shaped support structure of silicon and nickel.

[0022] As shown in FIG. 1, this embodiment includes: a U-shaped support platform 1, a mobile platform 2, a serpentine support spring 3, a centering mark 4, and a displacement mark 5. The serpentine support spring 3 connects the U-shaped support platform 1 and the mobile platform 2, and the two ends of the film sample 6 are respectively connected to the U-shaped support platform 1 and the mobile platform 2 in the air. The centering mark 4 is located on the mobile platform 2, and the displacement mark 5 is glued to the end of the film sample 6 and the end of the mobile platform 2. During the measurement, the U-shaped support platform 1 is fixed on the metal base, and the other end of the mobile platform 2 is connected to the The load cell is connected, and a horizontal pulling force is applied to the mobile platform 2 to realize the micro-tensile test. Through the loa...

Example Embodiment

[0036] Example 2 has a micro-tensile test piece structure with a silicon and nickel U-shaped support platform.

[0037] The material and structure of this embodiment are the same as those of Embodiment 1, but the size parameters of each part are different.

[0038] In this embodiment, the lower layer of the U-shaped support platform 1 is single crystal silicon with a thickness of 500 micrometers, the outer dimensions are 17 mm long, 17 mm wide, and the support beam width 3 mm; the upper outer peripheral dimensions are 15 mm long, 15 mm wide, and the support beam width 2 mm;

[0039] In this embodiment, the mobile platform 2 has a length of 12.5 mm and a width of 2.5 mm, the thickness and material are the same as those of the U-shaped supporting platform, and the diameter of the circular through hole at the front end is 1 mm;

[0040] In this embodiment, the serpentine support spring 3 has a line width of 50 μm and a thickness of 200 μm, the inner diameter of the arc of the curved ...

Example Embodiment

[0043] Example 3 has a micro-tensile test piece structure with a metal nickel U-shaped support platform.

[0044] As shown in FIG. 6, the structure of the micro-tensile test piece of this embodiment includes: a U-shaped support platform 1, a mobile platform 2, a serpentine support spring 3, a centering mark 4, and a displacement mark 5. Except for the size parameters, the U-shaped supporting platform 1 and the mobile platform 2 are all formed of electroplated metal nickel, the material and structure of the remaining parts are basically the same as those of the first embodiment.

[0045] In this embodiment, the outer dimensions of the U-shaped support platform 1 are 14 mm in length and 14 mm in width, and the support beam has a width of 2 mm and a thickness of 450 μm;

[0046] In this embodiment, the mobile platform 2 has a length of 10 mm and a width of 3 mm, the thickness and material are the same as the U-shaped supporting structure, and the diameter of the circular through hole...

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Abstract

The single -shaft micro tensile test piece to test the film dynamic performance includes the U shpe supporting platform, movable platform, the snake supporting spring, centring marker, displacement marker. The snake supporting spring is connected with the U shape supporting platform and movable platform; the U shape supporting platform and movable platform are connected with two suspended ends of the film sample; the centring marker is on the top of the movable platform; the displacement marker is pasted to the tail to movable platform and near to the film sample. Compared to the present test piece, the process is available, it has good repeatability and high yield; also it has avoided the test error generated by the supporting girder deformation in tension process. The test piece of invention is proper for the film micro dynamic performance test of single metal, alloy and compound material.

Description

technical field [0001] The invention relates to a tensile test piece in the technical field of testing, in particular to a uniaxial micro-tensile test piece used for testing the mechanical properties of thin films. Background technique [0002] With the rapid development of micro-electromechanical systems, various thin-film materials are widely used in micro-devices. Since the structure of micro-devices is not a simple reduction in the size of traditional mechanical structures, when the size of the structure is reduced to the order of microns / nanometers, there will be obvious size effects. , leading to significant changes in the mechanical and physical properties of materials, so the microscopic mechanical properties of thin film materials are significantly different from the macroscopic mechanical properties of materials. The mechanical performance parameters measured by large-volume samples are far from meeting the design requirements of MEMS devices. The microscale mechan...

Claims

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Application Information

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IPC IPC(8): G01N3/00G01N13/00
Inventor 汪红刘瑞丁桂甫李雪萍杨春生
Owner SHANGHAI JIAO TONG UNIV
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