Solar thermal-collecting tube reaction grid voltages feed back intelligent control method and apparatus

Abstract

The invention provides an intelligent control method for the solar energy collector tube reaction sputtering voltage feedback and a device thereof, and relates to a solar energy collector tube. The device of the invention comprises a target power supply, a control unit and an aeration unit. The control unit is connected with the target power supply and the aeration unit respectively. The method of the invention comprises the following steps: A. initialization parameters are set, which comprise a central voltage value V<0> and a central flow valve Q<0>; B. the target voltage is collected; C. difference between the target voltage and the central voltage value V<0> is analyzed and compared to make an judgment; D. a control directive is executed based on the judgment result. The method of the invention is the method generally applicable for various solar energy collector tube plating techniques, and is provided with the advantage of promoting the automation degree of the plating techniques and greatly improving the product quality. The device of the invention is provided with the advantage of the accurate control and the automatic adjustment.

Description

technical field [0001] The invention relates to a solar heat collecting tube, in particular to a solar heat collecting tube reactive sputtering voltage feedback intelligent control method and device. Background technique [0002] The inner tube of the solar vacuum heat collecting tube plays the role of energy conversion is the solar absorbing film layer. At present, there are two kinds of solar absorbing films on the market: interference film and gradient film. The aluminum nitride magnetron reactive sputtering step must be passed through to make the two films, which is an important part of the coating process. The equipment used for the coating of the inner tube of the vacuum heat collector is a single-target coating machine and a three-target coating machine. The sputtering targets used are all cylindrical aluminum targets. During the working process, the voltage fluctuates due to the rotation of the aluminum target. [0003] The direct consequence of voltage fluctuation ...

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Problems solved by technology

[0006] The purpose of the present invention is to provide a solar heat collector tube reactive sputtering voltage feedback intelligent control method and device for the defects of large voltage fluctuations and complex parameter settings in the above-mentioned prior art, which can be accurately controlled and has automatic adjustment at the same time, and It is a general method applicable to various solar collector tube coating processes, that is, to improve the automation of the coating process, and at the same time greatly improve the product quality

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