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Patterning method, droplet discharging device and circuit board

A substrate and pattern technology, which is applied in the manufacture of circuits, printed circuits, printed circuits, etc., can solve the problems of increasing drying speed, droplet bumping, and failure to form patterns, etc., and achieve the effect of improving productivity and drying speed

Inactive Publication Date: 2011-12-07
SEIKO EPSON CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0009] However, if the temperature of the substrate is increased, the dropped liquid droplets will bump, resulting in failure to form a pattern
Therefore, the method of increasing the temperature of the substrate has a limit in increasing the drying speed, and therefore, there is a limit in further shortening the time required for pattern formation.

Method used

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  • Patterning method, droplet discharging device and circuit board
  • Patterning method, droplet discharging device and circuit board
  • Patterning method, droplet discharging device and circuit board

Examples

Experimental program
Comparison scheme
Effect test

no. 1 approach

[0042] First, a circuit module constructed by mounting a semiconductor chip on an LTCC multilayer substrate will be described. figure 1 A cross-sectional view of the circuit module 1 is shown. The circuit module 1 includes a plate-shaped LTCC multilayer substrate 2 and a semiconductor chip 3 connected to the upper side of the LTCC multilayer substrate 2 by wire bonding.

[0043]The LTCC multilayer substrate 2 is a laminate of a plurality of low-temperature fired substrates 4 formed in a thin plate shape. Each low-temperature-fired substrate 4 is a sintered body of a glass-ceramic material (for example, a mixture of a glass component such as borate alkali oxide and a ceramic component such as alumina), that is, a porous substrate, and has a thickness of several hundred μm.

[0044] For the low-temperature firing substrate 4, the material before its sintering is called a green sheet 4G (refer to figure 2 , 4 , 7). The raw material sheet 4G is prepared by mixing glass-ceram...

no. 2 approach

[0093] Figure 9Among them, the stand 23 has a stand main body 23a, a rubber heater H arranged on the upper surface of the stand main body 23a, and a stand plate 23b arranged on the upper surface of the rubber heater H to constitute a mounting portion. The stage main body 23a is arranged on the upper surface of the base 21, and moves in the Y arrow direction and the direction opposite to the Y arrow direction by receiving the driving force of the Y axis motor MY. The rubber heater H is arranged between the stage main body 23a and the stage plate 23b, and heats the green sheet 4F placed on the upper surface of the stage plate 23b to a predetermined temperature. The stage plate 23b is a ceramic substrate, which is an air-permeable porous substrate, and the green sheet 4G is placed thereon. The green sheet 4G placed on the stage plate 23b receives heat from the rubber heater H through the stage plate 23b, and raises its entire upper surface to a predetermined temperature.

[00...

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Abstract

A patterning method, a droplet discharging device, and a circuit board are provided to form a high precision pattern within a short time by using a substrate having a breathable characteristic. A method for forming a pattern on a substrate includes a process for forming a pattern on an upper surface of a heated substrate having a breathable characteristic by discharging a droplet(Fb) including a functional fluid having a functional material on the upper surface of the heated substrate having the breathable characteristic. In the discharging process of the droplet, the pressure applied to a lower side of the breathable substrate is reduced during the droplet discharging process. The breathable substrate is attached to a breathable porous stage.

Description

technical field [0001] The present invention relates to a pattern forming method, a droplet discharge device, and a circuit board. Background technique [0002] As a method for forming a desired pattern on a substrate, an inkjet method in which a functional liquid is ejected in a droplet state has attracted attention as an effective means (for example, Patent Document 1). [0003] The inkjet method includes: a stage on which a substrate is placed, a droplet ejection head that ejects a functional liquid containing a functional material onto the substrate in a droplet state, and a two-dimensional space between the substrate (stage) and the droplet ejection head. Relatively mobile bodies. In the inkjet method, the liquid droplets ejected from the droplet ejection head are arranged on any position on the surface of the substrate through the relative movement of the substrate and the droplet ejection head. The droplets sequentially arranged on the surface of the substrate are a...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H05K3/14G02F1/133B41J3/407
CPCH01L2224/48091H01L2224/32225H01L2224/48227H01L2224/73265
Inventor 丰田直之三浦弘纲
Owner SEIKO EPSON CORP