Method and device for eliminating energy jitter of electronic microscope electron energy loss spectrum

Abstract

The invention provides an energy jitter method eliminating the energy loss spectrum of an electron microscope and the device thereof, and belongs to the energy spectrum measuring analysis and microscopic analysis field. The invention has the method that: an electron energy analyzer arranged at a lens cone of the electron microscope 1 receives electron energy, and then the received electron energy loss spectroscopy obtains the energy spectrum drift quantity by a drift detection module through a serial fast response energy spectrum detector 3, the energy spectrum drift quantity is inputted to a self-adapting limiter 6, the self-adapting limiter 6 obtains the next cycle predictor according to the reference signal provided by a signal generator 8, the predictor is converted and then outputted to a voltage control circuit of an electron beam drift tube 9 or inputted to a high pressure generator of the electron microscope 1 through a high-low voltage separating module 10. Using the method and the device thereof can realize the effective control of the energy jitter under the fixed narrow band frequency jamming appeared possibly in the receiving process of the electron energy loss spectroscopy.

Description

technical field [0001] The invention belongs to the fields of energy spectrum measurement analysis and microanalysis, and in particular relates to an adaptive notch method and device for eliminating energy spectrum drift of electron energy loss spectrum. Background technique [0002] When observing a thin sample with an electron microscope, the incident electrons will interact with the sample in multiple ways, causing the electrons to lose different amounts of energy at certain rates. If the intensity of the emitted electrons is counted on the dispersion plane of the electron energy loss spectrometer according to the amount of energy lost, the electron energy loss spectrum (Electron Energy-Loss Spectrum, abbreviated as EELS) can be obtained. Figure 1 shows the standard electron energy loss Spectrum diagram. Electron energy loss spectroscopy provides a wealth of sample information, such as chemical composition, chemical bonding, and properties of solid structures, electrons,...

AI Technical Summary

Problems solved by technology

[0011] The feature of the above method is to perform energy feedback on the interference signal of the whole frequency band, so it is difficult to take into account the interference of different frequencies. It is necessary to design the feedback loop to adjust the feedback gain to eliminate the interference of different frequencies.

In addition, external disturbances have time-varying characteristics, and the designed feedback loop does not have universal applicability

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