Micro-displacement measurement method based on guided mode excitated Goos-Hanchen shift enhancement effect

A technology of enhancement effect and measurement method, which is applied in the direction of optical waveguide light guide, optics, instruments, etc., can solve the problems of weak anti-interference ability and optical path difference, and achieve the effect of strong anti-interference ability and high sensitivity

Inactive Publication Date: 2008-08-13
SHANGHAI JIAO TONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
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Problems solved by technology

However, there are defects in these two technologies: they are easily affected by the optical path diffe...

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0016] The first step: making a double-sided metal-clad waveguide, forming a double-sided metal-clad waveguide structure consisting of a metal film deposited on a prism-air gap-a metal film deposited on an optical glass sheet. The refractive index of the prism is 1.5, the thickness of the metal film deposited on the prism is 25nm, the refractive index of the optical glass sheet is 1.5, the thickness of the metal film deposited on the glass sheet is 150nm, the thickness of the air gap in the waveguide layer is 0.1mm, and the refractive index of the air is 1. The metal is gold, and the dielectric coefficient near the wavelength of 859nm is ε=-28+1.8i.

[0017] Step 2: Install the double-sided cladding waveguide structure on the upper turntable of the optical rotary platform, make the bottom surface of the prism pass through the central axis of the rotary platform, and fix the photodetector on the lower turntable of the optical rotary platform, so that the laser beam, prism The ...

Embodiment 2

[0024] The first step: making a double-sided metal-clad waveguide, forming a double-sided metal-clad waveguide structure composed of a metal film deposited on a prism-air gap-a metal film deposited on an optical glass sheet. The refractive index of the prism is 1.5, and the thickness of the metal film deposited on the prism is 20nm. 1. The metal is gold, and the dielectric coefficient near the wavelength of 859nm is ε=-28+1.8i.

[0025] Step 2: Install the double-sided cladding waveguide structure on the upper turntable of the optical rotary platform, make the bottom surface of the prism pass through the central axis of the rotary platform, and fix the photodetector on the lower turntable of the optical rotary platform, so that the laser beam, prism The normal line of the bottom surface is in the same plane as the center of the photodetector, and the laser and the photodetector are symmetrical about the central axis of the double-sided metal clad waveguide structure.

[0026...

Embodiment 3

[0032] The first step: making a double-sided metal-clad waveguide, forming a double-sided metal-clad waveguide structure consisting of a metal film deposited on a prism-air gap-a metal film deposited on an optical glass sheet. The refractive index of the prism is 1.5, the thickness of the metal film deposited on the prism is 15nm, the refractive index of the optical glass sheet is 1.5, the thickness of the metal film deposited on the glass sheet is 300nm, the thickness of the air gap of the waveguide layer is 1mm, and the refractive index of air is 1 . Gold is used as the metal, and the dielectric coefficient near the wavelength of 862nm is ε=-28+1.8i.

[0033] Step 2: Install the double-sided cladding waveguide structure on the upper turntable of the optical rotary platform, make the bottom surface of the prism pass through the central axis of the rotary platform, and fix the photodetector on the lower turntable of the optical rotary platform, so that the laser beam, prism T...

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Abstract

The invention discloses a micro-displacement measurement method in the field of precision measurement technology, which bases on Goos-Hanchen(GH) shifts enhancement effect stimulated by guide mode, high parallel degree laser is shined into metal film deposited on prism-air gap-double-coated metal waveguide structure which is made of metal films deposited on optical glass, the laser is coupled into waveguide in meeting phase-matching, which causes reflective phases to change drastically comparing incident phases, and reflected beam Goos-Hanchen (GH) shifts are enhanced greatly, shifts are very sensitive to thickness changes of guided wave air gap, using the character, through detecting reflected light Goos-Hanchen (GH) shifts change, the optical glass position change compared to the prism position is measured, thus achieving the measurement of the measuring object shifts. This invention can achieve high sensitivity, fast and accurate real-time measurement, and the method is simple, and has good anti-interference capability, and can be widely used in construction, geological monitoring, processing machinery, materials testing of micro-shifts measurement.

Description

technical field [0001] The invention relates to a measurement method in the field of measurement technology, in particular to a micro-displacement measurement method based on a guided mode excitation Gus-Hanchen displacement enhancement effect. Background technique [0002] Micro-displacement measurement is widely used in construction, geological monitoring, and mechanical and material property measurement. Generally, the light intensity detection method of the planar optical waveguide or the method of laser interference is used. Among them, the light intensity detection method of the planar optical waveguide is to use the characteristic that the coupling of the planar optical waveguide to the laser is sensitive to the thickness parameter of the waveguide, and measure the change of the thickness of the waveguide layer in the waveguide by measuring the change of the reflected light intensity, so as to realize the correlation with the waveguide Movement of the object to be mea...

Claims

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Application Information

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IPC IPC(8): G01D5/28G02B6/13G02B1/10
Inventor 王毅曹庄琪余天一李红根沈启瞬
Owner SHANGHAI JIAO TONG UNIV
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