Micro- solid mode gyroscope

Abstract

The invention provides a micro-solid modal gyro in the micro electromechanical system technical field, comprising a piezoelectric control electrode, a piezoelectric sensing electrode, a piezoelectric driving electrode, a concentrated mass block, a linear vibration reinforced structure and an elastic base. The elastic base is provided with linear vibration reinforced structure; the linear vibration reinforced structure and the elastic base are fixedly connected with each other; the upper surface of the elastic base is provided with a trough which is internally provided with the concentrated mass block; the concentrated mass block is fixedly connected with the elastic base; the upper surface of the linear vibration reinforced structure is provided with the piezoelectric sensing electrode, the piezoelectric driving electrode and the piezoelectric control electrode. The micro-solid modal gyro works by the special vibration mode of the elastic base, increases the selectable freedom of the fabrication material of the micro gyro, leads the elastic base to be made of material with larger elasticity, and increases the micro-processability of the base material, thus being beneficial to improve the structure and shape of the micro gyro and improving the working performance of the gyro.

Description

technical field [0001] The invention relates to a device in the technical field of micro-electromechanical systems, in particular to a micro-solid mode gyroscope. Background technique [0002] Over the past century, gyro technology has undergone a series of revolutionary developments. At the beginning of the 20th century, Elmer Sperry invented the gyro compass and applied it in navigation. In the 1950s, the use of frame gyro and accelerometer systems to sense the six degrees of freedom of the aircraft has been realized. These early gyro systems were used for azimuth reference only, so no high accuracy requirements were placed on them. Due to the high complexity and high cost of the frame gyro system, the strapdown inertial reference system began to be developed in the 1970s. In order to obtain sufficiently high performance, the strapdown system requires high precision, and its gyro precision drift should be lower than 0.01deg / h. In order to meet such precision requiremen...

AI Technical Summary

Problems solved by technology

The elasticity and micromachinability of piezoelectric ceramics are limited, and the material and electrical properties of piezoelectric ceramics are sensitive to temperature, which limits the improvement of the manufacturing accuracy of this microgyroscope. Its material selectivity is limited and microfabrication is batched. Manufacturing feasibility is not high

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