Heavy caliber aspherical mirror checking system

An aspherical mirror and detection system technology, applied in measurement devices, testing optical properties, instruments, etc., can solve problems such as difficulty in adjustment, and achieve the effect of simplifying the manufacturing process, ensuring reliability, and avoiding mask alignment errors.

Active Publication Date: 2008-09-10
INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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Problems solved by technology

[0006] The technical problem to be solved by the present invention is to overcome the shortcomings of the existing computational hologram detection technology for aspheric mirrors, and provide a dual computational hologram detection system for large-diameter aspheric mirrors. The system makes full use of the characteristics of comp

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  • Heavy caliber aspherical mirror checking system
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Embodiment Construction

[0018] The present invention will be described in detail below in conjunction with the accompanying drawings and specific embodiments.

[0019] Such as figure 1 As shown, a large-diameter aspheric mirror detection system in this embodiment consists of a Fizeau type interferometer 1, a pinhole filter 2, a double calculation hologram 3, a measured aspheric mirror 4, a small five-dimensional adjustment frame 5 and a large The five-dimensional adjustment frame 6 is composed; the double calculation hologram 3 is composed of two parts: the main hologram and the alignment hologram, both of which are phase type calculation holograms and must be concentric; the double calculation hologram 3 is fixed On the small five-dimensional adjustment frame 5, place the Fizeau interferometer 1 and the pinhole filter 2 on the large five-dimensional adjustment frame 6, and adjust the double calculation hologram 3 relative to the measured aspheric mirror through the large five-dimensional adjustment ...

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Abstract

The invention provides a large aperture non-spherical surface mirror detection system which is characterized in that the detection system comprises a Fizeau interferometer, a small hole filer, a dual-calculation hologram, a non-spherical mirror to be measured, a large five-dimensional adjusting frame and a small five-dimensional adjusting frame; the dual-calculation consists of two image parts: a main hologram and an aligning hologram; the dual-calculation hologram is fixed on the small five-dimensional adjusting frame and is arranged on the large five-dimensional adjusting frame together with the Fizeau interferometer and the small hole filter; the adjusting state of the main hologram can be judged by observing the interference images of the aligning hologram; the relative position of the dual-calculation hologram and the Fizeau interferometer is kept unchangeable on the condition that the main hologram are precisely aligned,; the position of the main hologram corresponding to the non-spherical surface mirror corresponding to the large five-dimensional adjusting frame can be adjusted by adjusting the large five-dimensional adjusting frame; the small hole filter can filtrate the stray light diffracted by the dual-calculation hologram, and the contrast of the interference fringes is improved, thus realizing the high-precision detection of the non-spherical surface mirror to be measured. The detection system provides an effective detection mean for the development of the large-aperture non-spherical surface mirrors and has great application value.

Description

technical field [0001] The invention relates to an optical detection technology, in particular to a large-diameter aspheric mirror detection system for rotational symmetry, and belongs to the field of advanced optical manufacturing and detection technology. technical background [0002] The use of aspheric optical elements in the optical system has the advantages of improving image quality, simplifying the system, reducing the overall size of the system and reducing weight. With the continuous development of optical processing and detection technology, large-aperture optical systems with aspheric mirrors as key components have been more and more widely used in fields such as astronomical optics, space optics, laser atmospheric transmission, and inertial confinement fusion (ICF). . However, the processing of large-aperture high-precision aspheric optical elements requires corresponding detection methods. At present, high-precision aspheric surface detection is still a major...

Claims

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Application Information

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IPC IPC(8): G01M11/02G01B11/00
Inventor 谢意陈强伍凡
Owner INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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