Substrate for biochip, biochip, method for manufacturing substrate for biochip, and method for manufacturing biochip
A biochip and manufacturing method technology, applied in biochemical equipment and methods, biological material pretreatment, biological testing, etc., can solve problems such as the difficulty of immobilizing probe DNA and the reduction of DNA chip detection accuracy
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no. 1 Embodiment approach
[0071] The biochip substrate according to the first embodiment of the present invention, as shown in FIG. 1 and FIG. 2 which is a cross-sectional view viewed from the II-II direction, has a substrate 15 capable of introducing a plurality of hydroxyl groups (-OH) on the surface. , and configured on the substrate 15, provided with a plurality of holes 41a, 41b, 41c, 41d, 41e, 41f, 41g, 41h, 41i, 42a, 42b, 42c, 42d, 42e, 42f, 42h reaching the substrate 15, 42i, 43a, 43b, 43c, 43d, 43e, 43f, 43g, 43h, 43i, 44a, 44b, 44c, 44d, 44e, 44f, 44g, 44h, 44i, 45a, 45b, 45c, 45d, 45e, 45f, 45g, 45h, 45i, 46a, 46b, 46c, 46d, 46e, 46f, 46g, 46h, 46i, 47a, 47b, 47c, 47d, 47e, 47f, 47g, 47h, 47i, 48a, 48b, 48c, 48d, Metal-based films 13 of 48e, 48f, 48g, 48h, 48i, 49a, 49b, 49c, 49d, 49e, 49f, 49g, 49h, 49i. The film thickness of the substrate 15 is, for example, 550 μm, and as the material of the substrate 15, synthetic quartz (SiO 2 ) and a silicon substrate with a natural oxide film formed...
no. 2 Embodiment approach
[0080] The substrate for a biochip according to the second embodiment of the present invention, as shown in FIG. 7 and FIG. 8 , which is a sectional view viewed from the direction III-III, includes a base 15, and a base 15 arranged on the base 15 is provided with a base that reaches the base. 15 a plurality of holes 41a, 41b, 41c, 41d, 41e, 41f, 41g, 41h, 41i, 42a, 42b, 42c, 42d, 42e, 42f, 42h, 42i, 43a, 43b, 43c, 43d, 43e, 43f , 43g, 43h, 43i, 44a, 44b, 44c, 44d, 44e, 44f, 44g, 44h, 44i, 45a, 45b, 45c, 45d, 45e, 45f, 45g, 45h, 45i, 46a, 46b, 46c, 46d , 46e, 46f, 46g, 46h, 46i, 47a, 47b, 47c, 47d, 47e, 47f, 47g, 47h, 47i, 48a, 48b, 48c, 48d, 48e, 48f, 48g, 48h, 48i, 49a, 49b , 49c, 49d, 49e, 49f, 49g, 49h, 49i metal film 13. The respective film thicknesses and materials of the substrate 15 and the metal-based film 13 are the same as those of the biochip substrate shown in FIG. 1 , and thus description thereof will be omitted.
[0081]Furthermore, the biochip according to the...
no. 3 Embodiment approach
[0107] The biochip substrate shown in the third embodiment, as shown in FIG. 30 and FIG. 31 , which is a cross-sectional view viewed from the X X XI-XX XI direction, has a substrate 15 capable of introducing a plurality of hydroxyl groups on the surface, and a probe A plurality of through-holes 141a, 141b, 141c, 141d, 141e, 141f, 141g, 141h, 141i are disposed on the substrate 15 when biomolecules are bound to a plurality of hydroxyl groups, and define the binding regions of the probe biomolecules on the surface of the substrate 15. , 142a, 142b, 142c, 142d, 142e, 142f, 142h, 142i, 143a, 143b, 143c, 143d, 143e, 143f, 143g, 143h, 143i, 144a, 144b, 144c, 144d, 144e, 144f, 144g, 144h , 144i, 145a, 145b, 145c, 145d, 145e, 145f, 145g, 145h, 145i, 146a, 146b, 146c, 146d, 146e, 146f, 146g, 146h, 146i, 147a, 147b, 147c, 147d, 147e, 147f , 147g, 147h, 147i, 148a, 148b, 148c, 148d, 148e, 148f, 148g, 148h, 148i, 149a, 149b, 149c, 149d, 149e, 149f, 149g, 149h, 149i of the protective part 2...
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