Method for preparing colorful vanadium dioxide thermo color glass
A kind of vanadium dioxide thermochromic and titanium dioxide technology, which is applied in the field of preparation of colored vanadium dioxide coated glass
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Embodiment 1
[0021] (a) Substrate cleaning
[0022] Put the glass substrate into high-purity alcohol and clean it ultrasonically for 5 minutes; then put it into acetone solution and clean it ultrasonically for 5 minutes. It was then blown dry with nitrogen and immediately placed in the film preparation chamber.
[0023] (b) Film preparation
[0024] Preparation system: Magnetron sputtering is used. The magnetron sputtering system consists of a sample mounting chamber and a main sputtering chamber (45 cm in diameter). The main sputtering chamber is connected with a molecular diffusion pump with a vacuum of 2.0×10 -5 Pa. The sputtering chamber has three target positions for three different 2-inch diameter targets. Each target position is inclined upward at an angle of 30°, and can be co-sputtered in a confocal manner or independently sputtered with three targets. The temperature of the sample stage was raised to 500 °C and kept constant during the preparation of all films.
[0025] Th...
Embodiment 2
[0031] The cleaning and preparation system of the glass substrate is the same as in Example 1.
[0032] After the glass substrate is placed in the vacuum chamber, it is heated to 450°C, and it is inconvenient to maintain this temperature during the whole process of film preparation.
[0033] The preparation of vanadium dioxide is the same as embodiment 1, sputtering 50 minutes, VO 2 The film thickness is about 60nm.
[0034] The preparation of titanium dioxide: What adopt is metal titanium target (purity 99.5%), radio frequency sputtering, sputtering power is set as 120W, working gas is Ar gas and O 2 Gas mixed gas, the flow rate of Ar gas is 30sccm, O 2 The gas flow rate was 12 sccm. Sputtering for 30 minutes, TiO 2 The film thickness is about 40nm.
[0035] Viewed from the coated side of the glass, the reflection color of the glass is light blue.
Embodiment 3
[0037] The cleaning and preparation system of the glass substrate is the same as in Example 1.
[0038] The preparation condition of vanadium dioxide is the same as embodiment 1.
[0039] The preparation conditions of titanium dioxide are the same as in Example 1.
[0040] The deposition time of the vanadium dioxide thin film is 70 minutes, and the film thickness is 85 nanometers; the deposition time of titanium dioxide is 120 minutes, and the film thickness is 100 nanometers. Viewed from the coated surface of the glass, the reflection color of the glass is golden yellow.
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