Testing apparatus of multi-layer nano-film tunneling micro-gyroscope

Abstract

A detection device of a multi-layer nanometer film tunneling micro-gyroscope consists of a glass substrate, a fixed electrode cathode, a comb electrode anode, a sensitive mass block, a fixed seat, a fixed comb, a damping hole, a detection beam, a driving beam, a connecting block, a tunneling device, and a nano film, wherein a fixed seat and a comb are mounted on the sensitive mass block, the detection consists of the detection beam, the driving beam and the tunneling device, the tunneling device consists of a substrate, an insulating layer, an electrode and a nano film, the fixed electrode cathode and the comb electrode anode are mounted on the glass substrate, the damping hole comprises 96 square via holes, the tunneling device can form a multi-barrier pressure sensitive structure because of the nano film, and the sensitivity of the silicon piezoresistive pressure sensor can increased by 1-2 order of magnitude. The device has reasonable and compact structure, convenient detection, high detecting precision, high sensitivity and high resolution, which is not effected by temperature. Compared with prior art, the detection precision is increased by 2-3 times, the detection data is detailed, accurate and reliable.

Description

technical field [0001] The invention relates to a detection device of a multilayer nano-film tunneling gyroscope, which belongs to the technical field of measuring instruments and components of aviation aircraft. Background technique [0002] The micro-mechanical electronic gyroscope is a high-tech product developed in the 1990s. It is mainly used for attitude measurement and functional control of aerospace vehicles. It is one of the most important key devices that are indispensable for military and civilian aircraft. It has been highly valued by the world's aerospace science and technology field. [0003] At present, the commonly used detection methods of micro-mechanical gyroscopes are capacitive and piezoresistive. The piezoresistive type is realized based on the principle of piezoresistive effect of highly doped silicon. The pressure sensitive device formed by highly doped silicon has a strong temperature Dependence, the bridge detection circuit composed of pressure-sen...

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Problems solved by technology

[0003] At present, the commonly used detection methods of micro-mechanical gyroscopes are capacitive and piezoresistive. The piezoresistive type is realized based on the principle of piezoresistive effect of highly doped silicon. Dependence, the bridge detection circuit composed of pressure-sensitive devices will also cause precision drift due to temperature changes. The improvement of capacitive precision is to increase the capacitance area. Due to the miniaturization of devices, the effective capacitance area has been greatly affected. limit

[0004] The attitude measurement of the micro-mechanical electronic gyroscope is completed by the head of the detection device, and its sensitivity and resolution are very important. Due to the miniaturization and integration of the gyroscope, the sensitive area of ​​the detection is reduced accordingly, so the detection The sensitivity, resolution and other indicators of gyroscopes have reached the limit state of sensitive area detection, which limits the further improvement of gyroscope detection accuracy, and it is difficult to meet the needs of modern military and civilian equipment. In this situation, it is necessary to develop high-tech A brand-new microelectromechanical gyroscope detection device that can break through the limit state

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