Apparatus and method for moving a liquid by means of a piezoelectric transducer
A piezoelectric and liquid technology, used in chemical instruments and methods, measuring devices, machines/engines, etc., can solve problems such as solution structure size and frequency range limitation, and achieve the effect of reducing structure size and manufacturing cost.
Active Publication Date: 2013-03-27
BIOMENSIO LTD
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Problems solved by technology
[0005] However such solutions are often limited due to structure size and frequency range
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[0047] Refer to below figure 1 and 2 Two basic structures of the device of the present invention for moving liquid are explained.
[0048] figure 1 A first embodiment of a device with a device for moving a liquid in which a piezoacoustic resonant element is arranged on a substrate is shown.
[0049] The device 10 comprises a piezoacoustic resonant element 11 arranged on a silicon wafer as substrate 12 . The piezoelectric acoustic resonance element 11 includes a piezoelectric layer 110 composed of PZT having a layer thickness of 1 μm. On the upper side and the lower side of the piezoelectric layer 110, electrodes 111 and 112 composed of platinum plates with a layer thickness of 500 nm are provided. Between the electrodes 111, 112 there is a 2 o 3 The insulating layer 113 is formed. The lower electrode 112 is arranged on an acoustic mirror 13 consisting of a number of alternating layers with very different acoustic resistances. In this case for example W / SiO 2 layer. T...
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Abstract
An apparatus having a device for moving a liquid comprises a piezoacoustic resonator element (11) having at least one piezoelectric layer (110) and two electrodes (111 and 112) present on the piezoelectric layer (110). The piezoacoustic resonator element (11) is designed such that, owing to a voltage being applied to the piezoelectric layer (110) by means of the electrodes (111 or 112), a volume oscillation of the piezoelectric layer (110) is excited at a resonant frequency. The piezoelectric resonator element (11) can be acoustically coupled in a suitable manner to a liquid for the purpose of transmitting the excited oscillation into the liquid for the purpose of moving the liquid. The apparatus may be in the form of a micromixer or in the form of a micropump and may comprise, in addition, sensor elements (41) for detecting the attachment of substance.
Description
technical field [0001] The invention relates to an apparatus having means for moving liquids and a method for moving liquids using such means. Background technique [0002] Microfluidic systems used as biosensors, for example, require systems with microchannels of small cross-section due to their structural size and relatively small usable liquid volume. Due to the small cross-section and the relatively low flow velocity, the Reynolds number (Reynolds-Zahlen) of such a system is small, which characterizes the relationship between inertia and viscous force and is infinite for ideal liquids without viscosity. As a result, the liquid flow in these channels is mainly lamellar and thus insufficiently mixed. [0003] Such intensive mixing is necessary, for example, in biosensors in order to accelerate the polymerase chain reaction (PCR) or also to cause DNA hybridization, since both cases are diffusion-limited processes. [0004] To solve this problem, surface wave resonators ba...
Claims
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IPC IPC(8): G01N29/02B01F11/02F04B19/00
CPCB01L2300/0636F04B43/046B01F13/0059G01N2291/0252B01L2400/0439G01N29/022B01L2300/0663G01N2291/0224B01F11/0266B01L2400/0436G01N2291/0256G01N2291/0422G01N2291/0421B01L2300/0877F04B19/006B01L3/50273Y10T137/2213B01F31/86B01F33/30
Inventor 莱因哈德·盖布尔马赛厄斯·林克马蒂亚斯·施赖特简·韦伯
Owner BIOMENSIO LTD