Gas/ solid two-phase composite gyration basic method and device

Abstract

The present invention relates to a gas phase / solid phase composite gyration benchmarking method and a device, which belong to the technical field of precision gyration benchmarking. The method compositely uses the gas lubricating and error averaging technology and the solid supporting and damping technology, the method applies axial solid support in the axial anti-thrust gaseous film of a gas-floated shafting to form a composite supporting mode with the primary solid support and the subsidiary gas support or the primary gas support and the subsidiary solid support or the gas support and the solid support which are the equivalent in order to notably enhance the axial rigidity and bearing capacity of the gas-floated shafting. Applying radial solid support in the radial gaseous film of the gas-floated shafting, the method utilizes the slight elastic deformation of elastic elements to dissipate the medium / high-frequency micro-vibration energy of a mainshaft and the stored deformation energy and static friction characteristic of the elastic elements to enhance positioning damp in order to increase positioning precision. In the device, the solid elastic elements are respectively assembled in the axial anti-thrust gaseous film and the radial gaseous film. The method can establish a gyration benchmark which also takes high precision, high rigidity, high support, low vibration and highdisplacement sensitivity into consideration.

Description

technical field [0001] The invention belongs to the technical field of precision rotary reference, in particular to a gas / solid two-phase compound rotary reference method and device. Background technique [0002] Rotary reference is one of the core technologies in precision / ultra-precision measuring instruments, test equipment and manufacturing equipment. Due to the advantages of high rotary motion precision, high displacement sensitivity and minimal friction loss, the air-bearing shaft system has been increasingly used as a high-precision rotary reference in the above-mentioned equipment. [0003] At present, the basic structure of the commonly used air bearing shaft system is mainly composed of two parts: the air bearing main shaft and the air bearing sleeve. When the air film gap is built in the axial and radial directions to form gas support and lubrication, the air bearing main shaft can drive the load in the air bearing. Rotary movement in the shaft sleeve. However, ...

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Problems solved by technology

However, this type of shafting structure has the following problems in practical applications: (1) The axial support has low stiffness and poor bearing capacity

[0007] The above two schemes achieve the purpose of improving the bearing capacity and axial support rigidity by improving the air supply performance of the shaft system, which can be applied to medium and small loads, but cannot solve the problem of large or super large loads; in addition, the two This solution does not solve the problems of medium and high frequency micro-vibration and poor positioning accuracy in the system

[0008] Patent 200710098789.9 "A kind of air bearing" proposes a structure in the middle of the air bearing, which is composed of an upper chamber, a lower chamber and a damping hole, which is similar to an air spring double chamber. When the air bearing vibrates up and down At the same time, the pressure air in the middle reciprocates in the two chambers through the damping hole, which produces the same energy dissipation mechanism as the air spring, thereby improving the damping capacity of the air bearing. This invention can improve the air bearing spindle to a certain extent. The vibration amplitude in the downward direction, but the improvement effect on radial vibration is not significant. In addition, this method is an indirect damping method, which still uses the compressibility of the gas to construct the damping effect, so there is a large time constant and transition process. Similarly, this method does not solve the problems that the air-bearing shafting cannot be used for large or super large loads and poor positioning accuracy.

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