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Single (double) wing type gas/ liquid two-phase composite gyration basic method and device

A datum device and wing-type technology, applied in the directions of bearings, shafts and bearings, mechanical equipment, etc., can solve the problem of insignificant vibration suppression effect of the rotating body, and overcome the stability of single-cycle motion and poor repeatability of multi-cycle motion trajectories. The effect of improving smoothness and improving motion stability

Active Publication Date: 2009-01-07
哈尔滨超精密装备工程技术中心有限公司
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  • Description
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  • Application Information

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Problems solved by technology

This method is an indirect damping method, which still uses the compressibility of the gas to construct the damping effect, so there is a large time constant and transition process, and the suppression effect on the vibration of the rotating body is not obvious

Method used

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  • Single (double) wing type gas/ liquid two-phase composite gyration basic method and device
  • Single (double) wing type gas/ liquid two-phase composite gyration basic method and device
  • Single (double) wing type gas/ liquid two-phase composite gyration basic method and device

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0026] Such as figure 1 As shown, it is a structural configuration diagram of the gas / liquid two-phase composite rotary reference device equipped with an "I"-shaped air-floating spindle. The air-floating bushing 5 is fixed on a stable substrate such as the instrument base 7. The shaft sleeve 5 constitutes the basic structure of the air bearing shaft system. An axial and radial air film gap is formed between the air bearing main shaft 1 and the air bearing sleeve 5. When the air film gap is filled with pressurized gas, a gas bearing and Lubricated, the air-floating main shaft 1 can drive the load W to rotate in the air-floating bushing 5 . Utilizing the self-lubricating properties of the gas, the rotary motion has extremely small friction, which can ensure high displacement sensitivity of the rotary motion; the average effect of the gas film can ensure high rotary motion accuracy.

[0027] In order to overcome the axial and radial medium and high-frequency micro-vibrations of ...

Embodiment 2

[0031] Figure 4 It is a structural configuration diagram of a liquid damping system arranged at the upper end of the "T"-shaped air-floating main shaft, and its working principle and damping effect are similar to those of Embodiment 1.

Embodiment 3

[0033] Figure 5 It is a structural configuration diagram of a liquid damping system arranged at the lower end of the "T"-shaped air-floating main shaft, and its working principle and damping effect are similar to those of Embodiment 1.

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Abstract

The present invention relates to a single (double) wing type gas phase / liquid phase composite gyration benchmarking method and a device, which belong to the technical field of precision gyration benchmarking. The method compositely uses the gas-lubricated gyration technology and the liquid damping technology, the method utilizes the remarkable advantage of the error-averaging effect of the gas lubricating technology to ensure the gyration precision of a gyration benchmark. At the same time, the method utilizes the notable absorption effect of viscous liquid on the damp or energy of the vibration component of a gyrator to restrict the generation of the medium / high-frequency micro-vibration of the gyrator and improve the motional stability, repetitiveness and positioning reliability of the gyration benchmark. In the device, a liquid-damping system with an appropriate coefficient of viscosity is assembled on the upper end or lower end or both the upper and the lower ends of a gas-floated mainshaft. The method can establish a composite gyration benchmark which also takes high gyration precision, high motional stability, high repetitiveness and high positioning reliability into consideration.

Description

technical field [0001] The invention belongs to the technical field of precision rotary reference, in particular to a single (double) wing type air / liquid two-phase compound rotary reference method and device. Background technique [0002] Rotary reference is one of the core technical units in precision / ultra-precision measuring instruments, test equipment and manufacturing equipment. Due to the advantages of high rotary motion precision, high displacement sensitivity and minimal friction loss, the air-bearing shaft system has been more and more used in the above-mentioned equipment as a high-precision rotary reference. [0003] At present, the commonly used air bearing shafting structure is mainly composed of two parts: the air bearing main shaft and the air bearing sleeve. When the air film gap is built in the axial and radial directions to form gas support and lubrication, the air bearing main shaft drives the load on the air bearing sleeve. Make a rotary motion inside. ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F16C32/06
Inventor 谭久彬黄景志金国良杨文国
Owner 哈尔滨超精密装备工程技术中心有限公司
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