Electrostatic discharging protection circuit
An electrostatic discharge protection and circuit technology, applied in emergency protection circuit devices, emergency protection circuit devices for limiting overcurrent/overvoltage, circuits, etc. Problems such as poor ability to discharge current
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[0023] image 3 It is an electrostatic protection circuit using parasitic PMOS in high voltage process.
[0024] Such as image 3 As shown, the drain of the PMOS is connected to the gate and is connected to the VM terminal, and the source is connected to the substrate and is connected to the VDD terminal.
[0025] Figure 4 yes image 3 Physical cross-section of the PMOS shown.
[0026] Such as Figure 4 As shown, the gate of this parasitic PMOS is formed of metal, and between the metal gate and the channel is field oxide, generally referred to as field oxide. Generally, the turn-on voltage of the parasitic PMOS with the bottom metal (generally called Met1 in the process) as the gate is about -35V. Of course, the threshold voltage can be properly adjusted according to design requirements, mainly by modifying the thickness of the field oxide layer between the metal gate and the channel. For example, in order to obtain a higher turn-on threshold voltage, a higher metal la...
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