Automatic alignment apparatus of integrated photon chip and array optical fiber
A technology of integrated photons and arrayed optical fibers, applied in the field of mechanical devices, can solve the difficulties of increasing multiple optical paths at the same time with high-precision alignment and coupling, and adjust mutual coupling interference, etc., to achieve multi-purpose equipment space, high-precision alignment, and Ease of use
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[0019] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.
[0020] see figure 1 , figure 2 , image 3 and Figure 4 , the base plate 100 is provided with an intermediate platform 200, and the base plate 100 is provided with a first six-dimensional high-precision motion platform 300 and a second six-dimensional high-precision motion platform 400 symmetrically distributed around the intermediate platform 200, above the intermediate platform 200 A high-precision and general-purpose integrated photonic chip fixture 503 and a vacuum suction port 5031 are arranged. The structure of the first six-dimensional high-precision motion platform 300 is that a first X-axis axial motion platform 301 is provided on the bottom plate 100, and the first X-axis axis The moving platform of the moving platform 301 is connected to the fixed platform of the first Z-axis axial moving platform 302, and the first connecting bo...
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