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Liquid crystal display device and method of manufacturing the liquid crystal display device

A technology of a liquid crystal display device and a manufacturing method, which is applied in semiconductor/solid-state device manufacturing, optics, instruments, etc., can solve problems such as poor formation and lower pass rate, so as to avoid the reduction of aperture ratio, suppress the increase of contact resistance, and suppress Effect of decrease in pass rate

Active Publication Date: 2009-01-28
JAPAN DISPLAY INC
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, when removing residual deposits by etching, other layers that should not be removed are etched at the same time, resulting in poor formation and reduced yield

Method used

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  • Liquid crystal display device and method of manufacturing the liquid crystal display device
  • Liquid crystal display device and method of manufacturing the liquid crystal display device
  • Liquid crystal display device and method of manufacturing the liquid crystal display device

Examples

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Embodiment Construction

[0070] Next, a plan view configuration of a liquid crystal display device according to a first embodiment of the present invention will be described with reference to the drawings. figure 1 It is a plan view showing a schematic configuration of the liquid crystal display device of the present embodiment. in addition, figure 2 formed from figure 1 Of the plurality of pixels PXL in the display unit 10A, only three pixels PXL are enlarged in plan view. This figure shows the configuration when operating in the FFS mode. image 3 From figure 1 An enlarged plan view of one of the plurality of terminals TL of the terminal portion 10T is shown. exist Figure 1 ~ Figure 3 In , for convenience of description, only main components are shown.

[0071] In addition, in the following description of the top view structure, in order to complement the structure of the contact holes H1 to H13, the gate insulating film 12, the interlayer insulating film 15, the passivation film 17, and the...

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PUM

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Abstract

The object of the invention is to suppress the increase of contact resistance between electrodes and restrain the reducing of pass percent in a liquid crystal display device that controls a liquid crystal using an electric field that is substantially horizontal with respect to a transparent substrate. A method of manufacturing the liquid crystal display device includes: forming a first etching stopper electrode (20P) connected to the drain electrode(16D) and a common electrode (20) connected to a leading-out line, which pass through openings (H8, H9) formed on a passivating film (17) and a plainness film (18) covering a switching element (TR); forming a insulating film (21) by covering the first etching stopper electrode and the common electrode; selectively etching the insulating film in a dry-type way; removing a residue on the first etching stopper electrode by etching in a wet-type way; forming a pixel electrode (22) that is connected to the first etching stopper electrode and that extends onto the second insulating film.

Description

technical field [0001] The present invention relates to a liquid crystal display device and its manufacturing method, in particular, the present invention relates to a liquid crystal display device and its manufacturing method for controlling liquid crystal by using an electric field in a substantially horizontal direction relative to a transparent substrate. Background technique [0002] As a liquid crystal display device for obtaining higher contrast ratio and wider viewing angle, it is known that there is a liquid crystal display device using an electric field in a substantially horizontal direction relative to a transparent substrate, that is, through FFS (Fringe-Field Switching, fringe field switching) mode, A liquid crystal display device operating in an IPS (In-Plain Switching) mode or the like. [0003] In this liquid crystal display device, both a pixel electrode to which a display signal is supplied and a common electrode to which a common potential is supplied are...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02F1/1362G02F1/1333H01L27/12H01L21/84
CPCG02F1/13458G02F2001/134372G02F1/136227G02F1/134363G02F1/134372G02F1/13439
Inventor 青田雅明石田聪
Owner JAPAN DISPLAY INC
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