Vapor deposition apparatus for organic vapor deposition material and process for producing organic thin film

Abstract

The present invention provides a vapor deposition apparatus in which an organic vapor deposition material undergoes none of a compositional change, decomposition, and alteration. An organic vapor deposition material is put on a conveyor (30a) or (30b) in an amount corresponding to one substrate and introduced into a vapor deposition vessel (12) heated beforehand. The organic vapor deposition material is heated little by little for each substrate and disappears while emitting an organic-material vapor. Hence, the time period during which the material is being heated is short and the material is prevented from being decomposed or altered by water. Even when different organic compounds have been mixed, the mixture does not change in composition. Consequently, an organic vapor deposition material obtained by mixing a base material with a color former can be stored in a storage tank (34a) or (34b) and then put on the conveyor (30a) or (30b).

Description

technical field [0001] The invention relates to the technical field of organic thin films, in particular to a technology for manufacturing organic thin films with good quality. Background technique [0002] Organic EL elements are one of the display elements that have attracted the most attention in recent years, and have excellent characteristics such as high brightness and fast response speed. An organic EL element has a light-emitting region that emits three different colors of red, green, and blue on a glass substrate. The light-emitting area is stacked with an anode electrode film, a hole injection layer, a hole transport layer, a light-emitting layer, an electron transport layer, an electron injection layer, and a cathode electrode film in sequence. or blue hair color. [0003] Reference numeral 203 in FIG. 8 is a conventional organic thin film forming apparatus, and a vapor deposition container 212 is disposed inside a vacuum chamber 211 . The vapor deposition cont...

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Problems solved by technology

[0013] In addition, if the organic vapor deposition material mixed with the organic compound of the base material for forming the light-emitting layer and the organic compound of the chromogen is placed in the vapor deposition container 212 If the film is formed internally, steam is easy to be released when the evaporation temperature is low, so there is the following problem: after the film formation is performed on a plurality of substrates 205, the content ratio will change from the state at the initial stage of heating. After forming a film on a plurality of substrates 205, the content ratio of the organic material vapor released from the discharge port 224 is very different from the base material to the color former.

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