Time gating angular displacement sensor

Abstract

The invention provides a time grating angular displacement sensor which belongs to displacement precise measuring devices. The sensor comprises a frame which is used for winding a coil and composed of an outer circle matrix and an inner circle matrix; and slots are formed on the inner peripheral wall of the outer circle matrix and the outer peripheral wall of the inner circle matrix at equal intervals. The sensor is characterized in that the excitation coil is wound on the matrix, and the induction coil is wound on the other matrix; the induction coil and the excitation coil carry out the relative motion; the excitation coil is connected with an excitation power supply, an excitation signal and an electric signal which is output by the induction coil are respectively connected to an amplification circuit and subjected to the phase comparison by a digital phase comparator after the shaping by a shaping circuit; and the phase difference of the two signals is represented by the number of interpolated clock pulses, further converted to the angular displacement value and directly or indirectly displayed as the angular displacement data after the treatment by a microprocessor and a memory. The sensor has the advantages of simple structure, low cost, high resolution, strong anti-interference ability and easy productization.

Description

technical field [0001] The invention belongs to a displacement precision measuring sensor. Background technique [0002] Linear and angular displacement measurements are the most basic and common measurements. In order to take into account the measurement resolution and range, many displacement sensors adopt a grid structure that is precisely engraved on the substrate, such as a grating, a magnetic grid, etc., and the pulse signals sent by it during the movement are accumulated and counted, that is, the displacement measurement is realized. High-precision and high-density engraved lines cause many problems. On the one hand, the denser the engraved lines, the easier it is to be polluted. No matter how it is sealed and protected, under the harsh working conditions of the production site, its tiny dust and water vapor may contaminate the grid line, making it invalid for counting. On the other hand, the reticle cannot be infinitely dense, and the existing density is far from m...

AI Technical Summary

Problems solved by technology

To sum up, the disadvantages of existing grid displacement sensors are: complex structure, high price, poor anti-interference ability

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