Method for measuring thickness of wire-shaped narrowband filtering PSD thermal radiation plate
A technology of linear laser and thermal radiation plate, which is used in measurement devices, optical devices, instruments, etc.
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[0051] Example 1: Single optical path measurement method
[0052] Such as figure 1 As shown, the present invention uses a linear laser as the light source. The laser spot is linear, which has advantages compared with other shapes of lasers. The PSD can easily receive the laser reflected by the sample and make the spot positioning accurate.
[0053] The rest of the structure is the same as that in the background art, including 1. a linear laser, 2. a narrow band filter, 3. a lens, 4. a PSD position sensor.
Example Embodiment
[0054] Embodiment 2: Double optical path measurement method
[0055] Such as Figure 5 As shown, the sample 12 to be tested is fixed on the displacement frame 10, and the stepping motor 8 drives the displacement frame to move along the guide rail 11 at a certain speed through the transmission shaft 9 to realize real-time dynamic measurement of the thickness of the sample to be tested.
[0056] First, set and calibrate the measuring optical path. Place a standard sample with a known thickness h on the moving frame 10, and place two pairs of thickness measuring probes 5 symmetrically on both sides of the standard sample. The thickness measuring probe integrates a linear laser and a narrow band filter. Light sheet, lens, PSD position sensor and signal processing circuit board; make the linear laser inside the thickness measurement probe emit linear laser light and hit the standard sample, the reflected laser light passes through the narrow band filter inside the probe and then conver...
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