Micromechanical gyroscope self-exciting driving and demodulating apparatus

Abstract

The invention provides a self-excitation drive and demodulation device for a microelectron-mechanical gyro (MEMS GYRO), which is a system that can be used for realizing the self-excitation drive and angular velocity demodulation of the microelectron-mechanical gyro. The device mainly comprises an input signal interface circuit, a singlechip chip, an upper computer communication module, an angular velocity display module and an automatic gain feedback module. A loop acquires vibration displacement voltage signals of a drive mass block and a detection mass block of the microelectron-mechanical gyro by the input signal interface circuit; the singlechip chip extracts and generates a gain control signal respectively by amplitude and an automatic gain control algorithm, and transmits the gain control signal to an automatic gain control system; the automatic gain control system generates a variable voltage according to the gain control signal and a drive displacement signal transmitted by the input signal interface circuit, feedbacks the variable voltage to a drive end of the gyro so as to realize the adjustment on a driving signal of the gyro, and calculates the input angular velocity inside the singlechip simultaneously. The device realizes the integrated design of the self-excitation drive and angular velocity demodulation of the microelectron-mechanical gyro, reduces the volume and weight of the microelectron-mechanical gyro, and reduces the power consumption.

Description

technical field [0001] The invention relates to a self-excited drive and demodulation device for a micro-mechanical gyroscope, which is used for the control of a vibrating micro-mechanical gyroscope drive circuit and the demodulation output of an externally input angular velocity, and is especially suitable for applications such as high performance and high integration. Background technique [0002] Since the 1980s, with the development of silicon micromachining technology, micromechanical screws produced by silicon surface micromachining technology have been widely used in military and civilian fields due to their small size, light weight, low cost, and high reliability. be widely used. The difference between the silicon micromechanical gyroscope and the traditional gyroscope is that it adopts the principle of Coriolis force, and uses the phenomenon of Coriolis force generated when the vibrating object feels the angular velocity. Through a certain method, the Coriolis force...

AI Technical Summary

Problems solved by technology

[0004] The technical problem of the present invention is to overcome the disadvantages of large temperature drift, complicated system, large volume, complicated debugging and poor anti-interference ability in the existing micro-mechanical gyro self-excited drive and demodulation device analog circuit implementation method, and provide a A high-performance, low-power, highly-integrated micromachined gyro self-excited drive and demodulation loop digital implementation method

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