Double-step jigsaw puzzle scanner of scanning probe microscope
A technology for scanning probes and microscopes, applied in the field of scanning probe microscopes, can solve the problems of unfavorable microscope extreme conditions, increased interference, and vibration, etc., and achieve the effect of increasing structural complexity and compact structure
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Embodiment 1
[0034] Example 1: Basic Scanning Probe Microscope Dual-step Mosaic Scanner
[0035] The structural schematic diagram of the double-stepping mosaic scanner of the basic scanning probe microscope of the present invention is shown in figure 2 , including a base 1, a piezoelectric scanning tube 2, a column 3, and a slider 4, wherein the piezoelectric scanning tube 2 and the column 3 stand side by side and are fixed on the base 1, and the arrangement direction thereof is set as the Z direction, The slider 4 is arranged on the top of the piezoelectric scanning tube 2 and the column 3, between the slider 4 and the column 3 there is a groove 7 along the Z direction and a convex top 8 on the notch or the surface of the groove. direction, the maximum static friction force between the slider 4 and the column 3 is smaller than the maximum static friction force between the slider 4 and the piezoelectric scanning tube 2 .
[0036] The working principle of this embodiment is as follows:
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Embodiment 2
[0041] Example 2: Scanning Probe Microscope with Electrodes Along the Z Direction Double-step Mosaic Scanner
[0042] In the above-mentioned Embodiment 1, the piezoelectric scanning tube 2 must be able to be controlled to bend in the Z direction and the X direction. Arbitrary setting of the electrode direction of the piezoelectric scanning tube 2 can make the piezoelectric scanning tube 2 capable of being controlled to bend in the Z direction and the X direction, but the cooperation between the voltage signals on each electrode becomes complicated. The simplest electrode direction setting is: the arrangement direction of the piezoelectric scanning tube 2 and the column 3 is the same as the scanning bending direction of two opposite electrodes among the four external electrodes of the piezoelectric scanning tube.
Embodiment 3
[0043] Example 3: Scanning Probe Microscopy Dual Stepping and Jigsaw Scanner Containing Spacers
[0044] In the above embodiment, in order to make the maximum static friction force between the slider 4 and the column 3 smaller than the maximum static friction force between the slider 4 and the piezoelectric scanning tube 2, the piezoelectric scanning tube 2 and the slider according to the present invention Spacers 9 can be added between blocks 4 (see image 3 ).
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