Air conditioning tank for removing molecule pollutant in air

An air-conditioning box and pollutant technology, which is used in air-conditioning systems, space heating and ventilation, and household heating, etc., can solve the problems of inconvenient air humidity regulation, inability to meet humidity control requirements, and scrap wafers. The effect of improving the stability, improving the pass rate, and meeting the requirements of the process environment

Inactive Publication Date: 2009-04-29
SEMICON MFG INT (SHANGHAI) CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] However, the air conditioning box of the prior art cannot meet the requirements of the wafer manufacturing plant for filtering air molecular pollutants in the process environment. The reason is that the air molecular pollutants in the air cannot be fully filtered by the existing air conditioning box. If the air molecular pollutants in the air exceed a certain concentration, the wafer will be scrapped; in addition, the existing air conditioning box is not convenient enough to control the air humidity, and cannot meet the humidity control requirements of the wafer manufacturing plant for the process environment

Method used

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  • Air conditioning tank for removing molecule pollutant in air
  • Air conditioning tank for removing molecule pollutant in air
  • Air conditioning tank for removing molecule pollutant in air

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Embodiment approach

[0019] like figure 2 As shown, the air-conditioning box of the first embodiment of the present invention includes: an air-conditioning box shell 2, an air intake valve 21 installed in the inside of the air-conditioning box, a primary and medium-efficiency filter 22, a preheating coil 23, a precooling coil 24, water Mist cleaning system 20, recooling coil 25, reheating coil 26, fan 27, high efficiency filter 28 and air outlet valve 29, compared with the air conditioning box of the prior art, its biggest feature is that the precooling coil 24 A water mist cleaning system 20 is added between the recooling coil 25. When the air conditioning box of the present invention was in operation, the fan 27 operated, and the polluted air containing ammonium ions in the closed environment was sucked into the intake valve 21, passed through the primary and medium effect filter 22, and then passed through the preheating coil 23, the precooling coil 24 pre-heating and / or pre-cooling, the temp...

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Abstract

The invention provides an air-conditioning box capable of removing airborne molecular contaminants. The air-conditioning box comprises an air-conditioning box housing and an intake valve, a primary and mediate-efficiency filter, a pre-heating pipe coil, a pre-cooling pipe coil, a recooling pipe coil, a reheating pipe coil, a fan, a high-efficiency filter and an exhaust valve which are arranged inside the air-conditioning box housing sequentially. The inside of the air-conditioning box is also provided with a water mist washing system which is positioned between the precooling pipe coil and the recooling pipe coil. Compared with the prior air-conditioning box, the air-conditioning box of the invention can greatly improve the airborne molecular contaminant removal efficiency and effectively improve the stability of air humidity.

Description

technical field [0001] The invention relates to a filtering device, in particular to an air conditioning box for removing air molecular pollutants Background technique [0002] Air conditioners are playing an increasingly important role in modern production. With the advancement of science and technology, the manufacturing industry has higher requirements for the process environment in processing and production. For example, the irreplaceability of dust-free factories and clean workshops in the field of integrated circuit manufacturing fully reflects the impact of the process environment on production quality. Influence. [0003] In the process of producing wafers in the wafer manufacturing plant, it is necessary to control the temperature, humidity, suspended particles in the air, air molecular pollutants (AMC), such as ammonium ions , fluoride ion F - , Chloride ion Cl - , nitrite ion , Nitrate ion , Sulfate ion Strict control is required, which requires industr...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F24F3/16
Inventor 龚文卫
Owner SEMICON MFG INT (SHANGHAI) CORP
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