Air conditioning tank for removing molecule pollutant in air

Abstract

The invention provides an air-conditioning box capable of removing airborne molecular contaminants. The air-conditioning box comprises an air-conditioning box housing and an intake valve, a primary and mediate-efficiency filter, a pre-heating pipe coil, a pre-cooling pipe coil, a recooling pipe coil, a reheating pipe coil, a fan, a high-efficiency filter and an exhaust valve which are arranged inside the air-conditioning box housing sequentially. The inside of the air-conditioning box is also provided with a water mist washing system which is positioned between the precooling pipe coil and the recooling pipe coil. Compared with the prior air-conditioning box, the air-conditioning box of the invention can greatly improve the airborne molecular contaminant removal efficiency and effectively improve the stability of air humidity.

Description

technical field [0001] The invention relates to a filtering device, in particular to an air conditioning box for removing air molecular pollutants Background technique [0002] Air conditioners are playing an increasingly important role in modern production. With the advancement of science and technology, the manufacturing industry has higher requirements for the process environment in processing and production. For example, the irreplaceability of dust-free factories and clean workshops in the field of integrated circuit manufacturing fully reflects the impact of the process environment on production quality. Influence. [0003] In the process of producing wafers in the wafer manufacturing plant, it is necessary to control the temperature, humidity, suspended particles in the air, air molecular pollutants (AMC), such as ammonium ions , fluoride ion F - , Chloride ion Cl - , nitrite ion , Nitrate ion , Sulfate ion Strict control is required, which requires industr...

AI Technical Summary

Problems solved by technology

[0005] However, the air conditioning box of the prior art cannot meet the requirements of the wafer manufacturing plant for filtering air molecular pollutants in the process environment. The reason is that the air molecular pollutants in the air cannot be fully filtered by the existing air conditioning box. If the air molecular pollutants in the air exceed a certain concentration, the wafer will be scrapped; in addition, the existing air conditioning box is not convenient enough to control the air humidity, and cannot meet the humidity control requirements of the wafer manufacturing plant for the process environment

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