Air Conditioning Box for Removing Air Molecular Pollutants

An air-conditioning box and pollutant technology, which is applied in air-conditioning systems, space heating and ventilation, and household heating, etc., can solve problems such as inconvenient air humidity regulation, scrap wafers, and inability to meet humidity control requirements, etc. Wafer yield, meeting the requirements of the process environment, and the effect of improving humidity stability

Inactive Publication Date: 2011-11-30
SEMICON MFG INT (SHANGHAI) CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] However, the air conditioning box of the prior art cannot meet the requirements of the wafer manufacturing plant for filtering air molecular pollutants in the process environment. The reason is that the air molecular pollutants in the air cannot be fully filtered by the existing air conditioning box. If the air molecular pollutants in the air exceed a certain concentration, the wafer will be scrapped; in addition, the existing air conditioning box is not convenient enough to control the air humidity, and cannot meet the humidity control requirements of the wafer manufacturing plant for the process environment

Method used

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  • Air Conditioning Box for Removing Air Molecular Pollutants
  • Air Conditioning Box for Removing Air Molecular Pollutants
  • Air Conditioning Box for Removing Air Molecular Pollutants

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Embodiment approach

[0018] Such as figure 2 As shown, the air-conditioning box of the first embodiment of the present invention includes: an air-conditioning box shell 2, an air intake valve 21 installed in the inside of the air-conditioning box, a primary and medium-efficiency filter 22, a preheating coil 23, a precooling coil 24, water Mist cleaning system 20, recooling coil 25, reheating coil 26, fan 27, high efficiency filter 28 and air outlet valve 29, compared with the air conditioning box of the prior art, its biggest feature is that the precooling coil 24 A water mist cleaning system 20 is added between the recooling coil 25. When the air conditioning box of the present invention was in operation, the fan 27 operated, and the polluted air containing ammonium ions in the closed environment was sucked into the intake valve 21, passed through the primary and medium effect filter 22, and then passed through the preheating coil 23, the precooling coil 24 pre-heating and / or pre-cooling, the t...

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Abstract

The invention provides an air-conditioning box capable of removing air molecular pollutants, which comprises: an air-conditioning box shell, an air intake valve installed inside the air-conditioning box, a primary and medium-efficiency filter, a preheating coil, a precooling coil, and then The cooling coil, the reheating coil, the fan, the high-efficiency filter and the air outlet valve, and a water mist cleaning system is installed inside the air conditioning box, and the water mist cleaning system is located between the pre-cooling coil and the re-cooling coil. Compared with the existing air conditioning box, the present invention can greatly improve the removal efficiency of air molecular pollutants and effectively improve the stability of air humidity.

Description

technical field [0001] The invention relates to a filter device, in particular to an air conditioning box for removing air molecular pollutants. Background technique [0002] Air conditioners are playing an increasingly important role in modern production. With the advancement of science and technology, the manufacturing industry has higher requirements for the process environment in processing and production. For example, the irreplaceability of dust-free factories and clean workshops in the field of integrated circuit manufacturing fully reflects the impact of the process environment on production quality. Influence. [0003] In the process of producing wafers in the wafer manufacturing plant, it is necessary to control the temperature, humidity, suspended particles in the air, air molecular pollutants (AMC), such as ammonium ion NH 3 - , fluoride ion F - , Chloride ion Cl - , nitrite ion NO 2 - , nitrate ion NO 3 2- , Sulfate ion SO 4 2- Strict control is requi...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): F24F3/16
Inventor 龚文卫
Owner SEMICON MFG INT (SHANGHAI) CORP
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