Amplitude discriminating sensor, radio frequency transmission system and method for load resistance amplitude discrimination

A technology of radio frequency transmission and load impedance, which is used in semiconductor/solid-state device manufacturing, electrical components, plasma, etc. It can solve the problems of large circuit volume, low reliability, and low performance accuracy, and achieve high performance accuracy and reliability. Effect

Active Publication Date: 2011-09-14
BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
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Problems solved by technology

[0008] The above-mentioned prior art has at least the following disadvantages: since the consistency of the diode characteristic curve is difficult to guarantee, its performance accuracy is low, and the circuit volume is large, the consistency is poor, and the reliability is low

Method used

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  • Amplitude discriminating sensor, radio frequency transmission system and method for load resistance amplitude discrimination
  • Amplitude discriminating sensor, radio frequency transmission system and method for load resistance amplitude discrimination
  • Amplitude discriminating sensor, radio frequency transmission system and method for load resistance amplitude discrimination

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specific Embodiment

[0039] see image 3 , using two analog multipliers to detect the magnitude of the load impedance. The input of one analog multiplier is the voltage sine wave signal taken from the RF (radio frequency) transmission line, and the input of the other analog multiplier is the current sine wave signal taken from the RF transmission line. After being processed by the analog multiplier, the output signal is filtered by an RC low-pass filter and then input to the controller for the next step of processing.

[0040] Assuming that the voltage sampling signal is used as a reference, the voltage signal taken from the RF transmission line on the amplitude detector is u(t)=Ucosωt, and the current signal is i(t)=Icos(ωt-θ), where U and I are respectively is the amplitude of the voltage and current signals, θ is the phase of the current lagging behind the voltage, ω is the angular frequency, and t is the time.

[0041] According to the output expression of the analog multiplier MPY634: ...

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Abstract

The invention discloses an amplitude discrimination sensor, a radio frequency transmission system and a method for carrying out the amplitude discrimination of load impedance, wherein, the amplitude discrimination sensor is connected on a radio frequency main transmission line of the radio frequency transmission system, a voltage signal acquisition unit and a current signal acquisition unit of the amplitude discrimination sensor respectively acquire a voltage signal and a current signal of the radio frequency main transmission line, then the voltage signal and the current signal are received by an analog multiplier, the received signals are calculated, the signals after the calculation are input to a controller, and the controller carries out the calculation of the received signals to obtain the amplitude of the load impedance, thereby realizing the amplitude discrimination of the load impedance of the radio frequency transmission system. The performance precision is high, and the reliability is high.

Description

technical field [0001] The invention relates to a semiconductor processing technology, in particular to an amplitude detection sensor, a radio frequency transmission system and a method for detecting the amplitude of load impedance. Background technique [0002] Plasma is widely used in the production of semiconductor devices. In a plasma etch system, an RF power supply supplies power to the plasma chamber to generate the plasma. The plasma contains a large number of active particles such as electrons, ions, excited atoms, molecules and free radicals. These active particles interact with the wafer placed in the cavity and exposed to the plasma environment, causing the surface of the wafer material to Various physical and chemical reactions change the surface properties of the material and complete the etching process of the wafer. [0003] The commonly used RF power supply has an operating frequency of 13.56MHz, an output impedance of 50Ω, and is connected to the reaction ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/00H05H1/46H01L21/3065
Inventor 张文雯王东申浩南
Owner BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
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