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Piezoelectric device, angular velocity sensor, and method of manufacturing a piezoelectric device

A technology of angular velocity sensors and piezoelectric elements, which is applied in the field of piezoelectric element manufacturing, can solve problems such as the degradation of piezoelectric properties of piezoelectric materials, and achieve the effects of improved heat resistance, piezoelectric characteristics and heat resistance

Active Publication Date: 2009-05-20
SONY CORP
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  • Abstract
  • Description
  • Claims
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Problems solved by technology

However, since heat treatment by reflow soldering or the like is generally performed in the manufacturing process of electronic devices including piezoelectric materials, there is a problem that the piezoelectric properties of piezoelectric materials are deteriorated due to heating.

Method used

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  • Piezoelectric device, angular velocity sensor, and method of manufacturing a piezoelectric device
  • Piezoelectric device, angular velocity sensor, and method of manufacturing a piezoelectric device
  • Piezoelectric device, angular velocity sensor, and method of manufacturing a piezoelectric device

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no. 1 example

[0066] First, a first embodiment of the present invention will be described. FIG. 1 is a diagram showing a piezoelectric element and an angular velocity sensor including the piezoelectric element according to a first embodiment of the present invention.

[0067] The angular velocity sensor 31 includes a base body 130 and a vibrating arm 132 extending from the base body 130 and capable of vibrating. FIG. 1B is a cross-sectional view of a surface perpendicular to the longitudinal axis (Z-axis) of the vibrating arm 132 .

[0068] The angular velocity sensor 31 includes, for example, a semiconductor arm substrate 133 made of silicon, and a piezoelectric element 139 provided on the arm substrate 133 . As shown in FIG. 1B , for example, a first electrode film 34 a as a common electrode is laminated on a silicon substrate, and a piezoelectric film 33 is laminated on the first electrode film 34 a. On the first surface 33a that is the upper surface of the piezoelectric film 33, a sec...

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Abstract

A piezoelectric device includes a piezoelectric film and an electrode film. The piezoelectric film is constituted of lead zirconium titanate represented by Pb 1+X (Zr Y Ti 1-Y )O 3+x , where X is 0 or more and 0.3 or less and Y is 0 or more and 0.55 or less, the piezoelectric film having a tension stress. The electrode film applies a voltage to the piezoelectric film.

Description

[0001] Cross References to Related Applications [0002] The present invention comprises Japanese patent application JP 2007-297321 submitted to Japan Patent Office on November 15, 2007, Japanese patent application JP 2007-297323 submitted to Japan Patent Office on November 15, 2007, and Japanese patent application JP 2007-297323 submitted to Japan Patent Office on November 15, 2007, and The subject matter of Japanese Patent Application JP 2007-297325 filed in Japan Patent Office is hereby incorporated by reference in its entirety. technical field [0003] The present invention relates to a piezoelectric element used in a piezoelectric sensor, a piezoelectric actuator, and a pyroelectric infrared sensor, an angular velocity sensor including the piezoelectric element, and a method of manufacturing the piezoelectric element. Background technique [0004] In the past, lead zirconate titanate (Pb 1+X (Zr Y Ti 1-Y )O 3+X ) (hereinafter, referred to as PZT) is used as a piezoe...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L41/08H01L41/187G01P3/44G01C19/56G01C19/5621G01C19/5656G01C19/5663H01L41/18H01L41/22H01L41/257H01L41/316
Inventor 小池伸幸田村孝
Owner SONY CORP
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