Split type micro-electric mechanic system and preparation method thereof

A micro-electromechanical system, split technology, applied in the field of micro-processing, can solve the problems of the chip cannot be reused, the chip operation cost is high, and has no practicability, so as to ensure light transmittance and surface biochemical characteristics, suitable for one-time use. Useful, reliable results

Inactive Publication Date: 2009-06-03
PEKING UNIV
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  • Description
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  • Application Information

AI Technical Summary

Problems solved by technology

The chip contains multiple functions and has a complex structure, but the cost of preparation is high; and the integration of microfluidic channels on the chip makes the biological sample directly contact with the chip, so that the chip cannot be reused; as mentioned above, the above two factors make the chip The unit operating cost is too high to be practical

Method used

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  • Split type micro-electric mechanic system and preparation method thereof
  • Split type micro-electric mechanic system and preparation method thereof
  • Split type micro-electric mechanic system and preparation method thereof

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Embodiment Construction

[0019] The split micro-electro-mechanical system proposed by the present invention and its preparation method are described as follows with reference to the accompanying drawings and examples.

[0020] Embodiments of the split micro-electro-mechanical system of the present invention are as follows figure 1 As shown, the system includes: a microfluidic chip 1 made of polydimethylsiloxane, the thickness of which is about 2-3mm, and the microfluidic chip 1 contains a sample channel 3 to be detected and analyzed, and the channel The width 12 is 200 μm, the thickness 13 is 50 μm, and the length direction is arranged in a serpentine manner, with a total length of 2 m; the connection between the concave channel and the microfluidic chip has two ports 4 and 5 with an aperture of 1 mm; Functional base 2 includes: a silicon dioxide insulating layer 6 formed on the inner surface of the bottom of the functional base, with a thickness of A plurality of parylene connection structures 8 an...

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Abstract

The invention relates to a micromachining process, and particularly relates to a biological micro-electric mechanic system. The invention provides a split type micro-electric mechanic system and a preparation method thereof. The split type micro-electric mechanic system comprises separate polymer microfluidic chips on the structure and a functional base, wherein, the functional base has the advantages of stable structure, reliable performance and repeat application by adopting the process technology of the high-precision silicon-based micro-electric mechanic system; and the microfluidic chips have the advantages of extremely low cost and disposable application by adopting the micro process technology of the high-flux polymer. Therefore, the micromachining process can be applied under different situations, and is particularly suitable for the design of the low-cost, rapid, multifunctional integrated and portable clinical biological micro-electric mechanic system.

Description

technical field [0001] The invention relates to micromachining technology, in particular to biological microelectromechanical systems. Background technique [0002] With the continuous development of micromachining technology, portable clinical micro-electromechanical systems with small size, low power consumption, no need for complex external equipment, and integration of multiple clinical functions have become a current research hotspot, and are also considered to be the next generation of clinical testing and monitoring. One of the key technologies to build a real point of care. In sharp contrast to the vigorous development of related laboratory research, the industrialization of biological MEMS has been slow or even stagnant, and the cost of the final device is recognized as a key issue that needs to be solved urgently. [0003] Due to the requirements of biochemical reactions, biological micro-electromechanical systems are usually large in size (cm order), which loses ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B81B7/02B01L3/00B81C1/00
Inventor 王玮雷银花李志宏
Owner PEKING UNIV
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