Optimized making method based on flat-plate wave guide mobile afebrile array wave guide grating

Abstract

The invention provides an optimized producing method for a mobile athermal array waveguide grid based on planar waveguide, comprising the following steps; input waveguide, output and input waveguide, planar waveguide, output planar waveguide and array waveguide are jointly deposited on an AWG chip on a silicon substrate to produce AAWG; the AWG chip are coupled, debugged and solidified with an input fiber array and an output fiber array and the property parameter a1 is tested; the solidified AWG chip is divided into a first area and a second area of the AAWG and the waveguide length loss L caused by the division is tested; the second area is sliced and fixed with a second substrate and is arranged on a stationary fixture; the first area of the AAWG are fixed with a first substrate by a six-dimensional fine-tuning frame fixture, a compensation rod is arranged on the first area and the first substrate and is solidified; the second coupling and debugging are carried out on the stationary fixture with the second area and the second substrate by the six-dimensional fine-tuning frame fixture with the first area and the first substrate and the property parameters a2, a3 and a4 are tested; the first substrate and the second substrate are solidified.

Description

technical field [0001] The invention relates to a manufacturing method of a mobile athermal array waveguide grating based on a flat waveguide. In particular, it relates to an optimized manufacturing method based on a planar waveguide movable athermal array waveguide grating using a 6-dimensional fine-tuning frame fixture for coupling debugging. Background technique [0002] As the continuous growth of IP data services and the emergence of various broadband access services have brought about unlimited demands on bandwidth, Dense Wavelength Division Multiplexing (DWDM) technology has been flourishing. Planar light wave circuit (PLC) technology has become the mainstream industry of DWDM optical communication system because of its low cost, easy mass production, good stability, easy integration and many other characteristics. At present, the production of optical waveguides is mainly completed on substrate materials such as LiNb03, glass, InP, Si, etc. Among them, silicon-based...

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