Preparation of fullerene-like carbon film
A technology of fullerene carbon film and type, which is applied in ion implantation plating, coating, metal material coating process, etc., can solve the problems of low friction performance, high deposition temperature, limited use range, etc., and achieve low friction coefficient. , high hardness, good elastic recovery performance
Inactive Publication Date: 2010-11-24
LANZHOU INST OF CHEM PHYSICS CHINESE ACAD OF SCI
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Problems solved by technology
The present invention combines high-energy particle bombardment and magnetron sputtering to reduce the energy required to form a fullerene-like structure in the deposition process, thereby solving the problems of high deposition temperature and high usage in the traditional fullerene-like carbon film preparation process. A limited range of problems, fabricating fullerene-like carbon films with high elasticity and low friction properties on metallic substrates
Method used
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Experimental program
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Embodiment 1
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Abstract
The invention discloses a method for preparing a fullerene-like carbon film with high elasticity and low friction. The invention adopts a composite vapor phase deposition system and utilizes the method of combining the pulse high voltage bias and the magnetron sputtering to prepare the film. The prepared fullerene-like carbon film has the atomic surface finish, low friction parameter, high hardness and good elastic restitution performance, so the film is suitable for lubricating high precision space motion parts and micro-electro-mechanical systems and can become an antifriction and abrasion resistant solid lubricating film with a long service life and low friction.
Description
Preparation method of fullerene-like carbon film technical field The invention relates to a preparation method of a high-elasticity and low-friction fullerene-like carbon film. Background technique In order to meet the special requirements on the surface of materials in the fields of aerospace, microelectronics, biology and medicine, solid lubricating films are developing in the direction of low friction, high hardness and long life. Using the latest advances in thin film science, surface modification and nanotechnology, through the selection of deposition methods and structural design, the development of new lubricating thin film materials with high elasticity and low friction in special environments and working conditions is important for the national high-tech field. development is of great significance. Compared with conventional solid lubricant films, amorphous carbon film has a series of excellent tribological properties. Amorphous carbon film has many different str...
Claims
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IPC IPC(8): C23C14/24C23C14/30C23C14/35
Inventor 王鹏张俊彦刘维民
Owner LANZHOU INST OF CHEM PHYSICS CHINESE ACAD OF SCI