Repeatedly-usable atomic oxygen probe and detection system

Abstract

The invention discloses an atomic oxygen probe and a detection system which can be repeatedly used, belonging to gas detection field. The invention adopts a zinc oxide semiconductor film prepared on a sapphire substrate as a probe plated with metal electrodes and connected with a direct current power supply and a current meter via wire. The probe is mounted on a semiconductor heater, whose side surface is mounted with a thermocouple for measuring and controlling probe temperature. When atomic oxygen is acted with the probe, the resistance change of the zinc oxide film resistor can be measured to obtain the flux change of atomic oxygen beam, thereby realizing detection. The atomic oxygen absorbed on the surface of the semiconductor film can be desorbed via the heating of the heater, to return the resistance value to initial value, thereby realizing repeated application. The invention atomic oxygen probe and detection system have good response characteristic to atomic oxygen, and via heating, the probe has stable repeated application characteristic. The invention can be used to detect the atomic oxygen on ground and the orbit of low earth satellite.

Description

technical field [0001] The invention relates to a reusable atomic oxygen probe, which belongs to the field of gas detection. Background technique [0002] When carrying out research work on the ground simulation method of atomic oxygen environment in low earth orbit, it is necessary to measure the beam intensity and flux of atomic oxygen generated by the ground atomic oxygen simulation equipment, and it is also necessary to carry instruments and equipment on the satellite to monitor the low earth orbit Real-time detection of atomic oxygen beam intensity and flux in the environment. [0003] Now the usual practice is to use the film to react with atomic oxygen, resulting in a decrease in mass or an increase in resistivity, the reaction of atomic oxygen with the metal, the release of heat, and the reaction of atomic oxygen with the conductive metal film, resulting in an increase in the mass of the film layer. Oxygen beam strength and flux. [0004] Several common detection m...

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Problems solved by technology

[0005] The purpose of the present invention is to provide a reusable atomic oxygen probe and det...

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