Light intensity correcting method for arranging annular light intensity monitoring section around interferogram
A light intensity monitoring and interferogram technology, applied in optical radiation measurement, optics, measuring devices, etc., to achieve the effect of improving light intensity correction accuracy and simple hardware system
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[0022] The present invention is especially suitable for the Fizeau type interferometer, because in this interferometer, the measurement light and the reference light are also almost completely in the same path, only the light path between the reference surface and the measured surface is unique to the measurement light path, and the light intensity is corrected. Higher precision. Taking a typical Fizeau interferometer as an example, its optical path is as follows figure 1 shown. The laser light emitted by the light source 1 is collimated by the collimating lens 2, and then enters the semi-transparent and semi-reflective reference mirror 5 through the beam splitter 3, and the reflected light on the rear surface is used as the reference light, and the transmitted light is incident on the measured mirror 7. Generally, Fizeau interferometers make full use of the apertures of the reference mirror and the mirror under test to form an interferogram, and measure the full aperture of ...
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